Preparation method of heterogeneous Ge-based pin diode string in reconfigurable multilayer holographic antenna

A technology of diode strings and holographic antennas, applied in antennas, radiation element structures, semiconductor/solid-state device manufacturing, etc., can solve the problems of low carrier mobility, large injection dose and energy, and low integration High carrier mobility, improved breakdown voltage, and improved device performance
CN106601616AInactive Publication Date: 2017-04-26XIAN UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XIAN UNIV OF SCI & TECH
Publication Date
2017-04-26
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a preparation method of a heterogeneous Ge-based pin diode string in a reconfigurable multilayer holographic antenna. The preparation method comprises the steps of: selecting a GeOI substrate in a crystal orientation, and setting an isolation region in the GeOI substrate; etching the GeOI substrate to form P-type grooves and N-type grooves, wherein the depth of the P-type grooves and the N-type grooves is less than the thickness of top layer Ge of the GeOI substrate; filling the P-type grooves and the N-type grooves, and adopting ion implantation to form a P-type active region and an N-type active region in the top layer Ge of the GeOI substrate; and forming a lead wire on the GeOI substrate, so as to complete the preparation of the heterogeneous Ge-based pin diodes. The preparation method provided by the invention can prepare and provide high-performance Ge-based plasma pin diodes suitable for forming a solid-state plasma antenna by utilizing the deep trench isolation technology and the ion implantation process.
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Description

Technical field

[0001] The invention relates to the technical field of semiconductor device manufacturing, in particular to a method for preparing a heterogeneous Ge-based pin diode string in a reconfigurable multilayer holographic antenna. Background technique

[0002] A wireless communication system that can dynamically adapt to changing environmental propagation characteristics will be the key to next-generation communication applications. The antenna is an extremely important component in any wireless device because it transmits and receives radio waves. The performance of the antenna represents the performance of most wireless devices, so the performance of the antenna is a key part of the system.

[0003] A reconfigurable antenna is an antenna that changes its radiation, polarization and frequency characteristics by changing its physical structure. Among them, frequency reconfigurable antennas have greatly expanded the scope of application because they can be applied to mult...

Claims

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