Optical fiber mini-sized hydrophone

A hydrophone and optical fiber technology, applied in the field of optical fiber micro hydrophones, can solve the problems of complex membrane processing technology, reduce mechanical sensitivity, reflected light signal error, etc., so as to improve detection accuracy, reduce production cycle, and improve deformation. Effect

Inactive Publication Date: 2017-05-10
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problem of diaphragm material and diaphragm shape of diaphragm type optical fiber F-P (Fabry-Perot) hydrophone, the invention discloses an optical fiber miniature hydrophone; Silicon and silicon nitride diaphragms have complex processing technology, long production cycle, and high cost, and the thickness of

Method used

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  • Optical fiber mini-sized hydrophone
  • Optical fiber mini-sized hydrophone
  • Optical fiber mini-sized hydrophone

Examples

Experimental program
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Example Embodiment

[0032] Specific embodiment one

[0033] The optical fiber micro hydrophone of this embodiment has a schematic structural diagram such as figure 1 Shown. The optical fiber micro hydrophone includes a four-layer structure, the first layer is a diaphragm, the diaphragm is a PDMS flat membrane 12, the second layer is the first support layer 2 with a circular through hole in the center, and the third layer is the center The second supporting layer 3 with circular through holes, the fourth layer is the third supporting layer 4 with circular through holes in the center and vent holes at the edges; the diaphragm, the first supporting layer 2, the second supporting layer 3 and the second supporting layer 3 The three support layers 4 are aligned and bonded together in turn; the diameters of the circular through holes of the first support layer 2, the second support layer 3 and the third support layer 4 are sequentially reduced and arranged in a stepped manner; in the third support layer A...

Example Embodiment

[0034] Specific embodiment two

[0035] The optical fiber micro hydrophone of this embodiment has a schematic structural diagram such as figure 2 Shown. The optical fiber micro hydrophone includes a four-layer structure, the first layer is a diaphragm, the diaphragm is a PET pattern film 1, the second layer is a first support layer 2 with a circular through hole in the center, and the third layer is the center The second supporting layer 3 with circular through holes, the fourth layer is the third supporting layer 4 with circular through holes in the center and vent holes at the edges; the diaphragm, the first supporting layer 2, the second supporting layer 3 and the second supporting layer 3 The three support layers 4 are aligned and bonded together in turn; the diameters of the circular through holes of the first support layer 2, the second support layer 3 and the third support layer 4 are sequentially reduced and arranged in a stepped manner; in the third support layer A fer...

Example Embodiment

[0036] Specific embodiment three

[0037] The optical fiber micro hydrophone of this embodiment, on the basis of the specific embodiment 1, is further limited to a metal layer 8 plated in the middle of the PDMS flat film 12, such as image 3 Shown.

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Abstract

The invention discloses an optical fiber mini-sized hydrophone belonging to a sound pressure sensor technology field. The optical fiber mini-sized hydrophone comprises a four-layer structure. A first layer is a diaphragm, which is a PDMS flat diaphragm or a PET convolution diaphragm. A second layer is a first supporting layer having a circular through hole in a center, and a third layer is the second supporting layer having the circular through hole in the center. The fourth layer is the third supporting layer having a circular through hole in the center and an air vent hole in an edge. The center of the diaphragm, the center of the first supporting layer, the center of the second supporting layer, and the center of the third supporting layer are sequentially aligned with each other, and are bonded together. The diameter of the circular through hole of the first supporting layer, the diameter of the circular through hole of the second supporting layer, and the diameter of the circular through hole of the third supporting layer are reduced sequentially, and the above mentioned circular through holes of the supporting layers are in a ladder-shaped arrangement. An inserting core is disposed in the circular through hole of the third supporting layer, and an optical fiber is inserted in the inserting core. An F-P cavity is arranged from the diaphragm to the end surface of the optical fiber. The optical fiber mini-sized hydrophone is used to solve technical problems caused by the materials or the shapes of the diaphragms.

Description

technical field [0001] The optical fiber miniature hydrophone of the invention belongs to the technical field of sound pressure sensors. Background technique [0002] At this stage, a type of diaphragm-type optical fiber F-P (Fabry-Perot) hydrophone has emerged, which has the technical advantages of high sensitivity and fast response in principle. The characteristic of this type of hydrophone is that the sensitive diaphragm and the end face of the optical fiber form an F-P cavity. The external sound pressure signal will cause the sensitive diaphragm to vibrate, thereby changing the cavity length of the F-P cavity, resulting in a change in the reflected light signal. By detecting this change, The detection of information related to external sound pressure can be realized. [0003] The performance of a hydrophone is directly related to the diaphragm. At present, the diaphragms of this type of hydrophone are flat films made of silicon, silicon dioxide, silicon nitride or PET ...

Claims

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Application Information

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IPC IPC(8): G01H9/00
CPCG01H9/004
Inventor 金鹏刘彬王艾琳王兴林杰韩余
Owner HARBIN INST OF TECH
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