A Vibration Acceleration Sensing Device Based on Silicon Carbide Optical Fiber f-p Resonant Cavity

Abstract

The invention relates to the technical field of optical fiber sensing devices, in particular to a vibration acceleration sensing device based on a silicon carbide optical fiber F-P resonant cavity. The vibration acceleration sensing device comprises a packaging shell, a ceramic base, sapphire optical fiber and a vibrating sensitive piece, wherein the ceramic base is fixedly arranged in the packaging shell, a square fixing groove is formed in the upper end face of the ceramic base, and the vibrating sensitive piece is embedded in an opening in the upper end of the fixing groove; a center through hole penetrating through the fixing groove is formed in the lower end of the ceramic base, the sapphire optical fiber penetrates through the center through hole, and the F-P resonant cavity is formed by arranging the upper end face of the sapphire optical fiber and the vibrating sensitive piece in a spaced mode. The vibration acceleration sensing device is reasonable in structure, the vibrating sensitive piece of a silicon-carbide-based four cantilever structure is packaged on the zirconia ceramic base, the F-P resonant cavity is formed by the end face of the sapphire optical fiber and the vibrating sensitive piece in the spaced mode, vibration or acceleration detection in the ultra-high temperature environment can be achieved, and the vibration acceleration sensing device is intrinsically safe in overall structure, large in measurement range and high in measurement precision.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensing devices, in particular to a vibration acceleration sensing device based on a silicon carbide optical fiber F-P resonant cavity. Background technique [0002] Vibration is a common and important physical quantity. During the operation of systems such as aero-engines, heavy-duty gas turbines, and high-temperature casting equipment, real-time monitoring of equipment vibration can detect abnormal conditions in time and improve the service life of equipment. In order to more accurately measure the vibration of equipment in an ultra-high temperature environment, it is necessary to install the sensor inside the equipment so that it is close to the vibration source to collect signals. At present, in the field of high-temperature vibration measurement, electric sensors are mostly used to measure the vibration of equipment. The sensor is made of piezoelectric ceramics. The temperature resistan...

AI Technical Summary

Problems solved by technology

At present, in the field of high-temperature vibration measurement, electric sensors are mostly used to measure the vibration of equipment. The sensor is made of piezoelectric ceramics. The temperature resistance of this type of sensor usually does not exceed 1000 ° C, which cannot meet the vibration conditions of ultra-high temperature environments above 1200 ° C. signal measurement

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