A kind of diamond/diamond-like carbon multilayer composite coating and preparation method thereof

A diamond coating, multi-layer composite technology, applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of coating stress and coating toughness, etc. , Solve the effect of high stress and poor toughness

Active Publication Date: 2019-03-01
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing a diamond / diamond-like multilayer composite coating, which aims to solve the problem that the existing method for preparing diamond / diamond-like cannot solve the problems of coating stress and coating toughness

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  • A kind of diamond/diamond-like carbon multilayer composite coating and preparation method thereof

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preparation example Construction

[0017] Specifically, the embodiment of the present invention provides a method for preparing a diamond / diamond-like carbon multilayer composite coating, which includes the following steps:

[0018] S01. Provide a substrate, perform surface pretreatment on the substrate and then load the furnace;

[0019] S02. Under vacuum conditions, pass in methane and perform the first coating process, depositing a diamond coating on the surface of the substrate, wherein the heating temperature of the first coating process is 2000-2500°C, and the substrate temperature is 600-1000°C, the methane concentration is 0.5-3%;

[0020] S03. Under vacuum conditions, adjust the heating temperature and methane concentration to perform a second coating process, deposit a diamond-like coating on the surface of the diamond coating, wherein the heating temperature of the second coating process is 1500-2200°C, The substrate temperature is 400-800°C, and the methane concentration is 2-5%;

[0021] S04. Repeat the f...

Embodiment 1

[0041] In this embodiment 1, a WC-6%Co tool is used as a substrate, and the method for preparing a diamond / diamond-like carbon multilayer composite coating on the substrate includes the following steps:

[0042] S11. Provide a substrate, perform surface pretreatment on the substrate and then load the furnace; specifically,

[0043] S111. Put the WC-Co knife into the acetone solution for ultrasonic cleaning for 30 minutes, and dry it in a constant temperature drying oven at 60°C for 10 minutes;

[0044] S112. Put the cleaned carbide tool into K 3 [Fe(CN) 6 ]+KOH+H 2 O(wt%=1:1:10) alkali mixture ultrasonic for 10min, remove distilled water for cleaning, and then use H 2 SO 4 +H 2 O 2 (vol%=1:10) Soak for 10s, take out distilled water for cleaning, and dry at 60℃ for 20min;

[0045] S113. Put the pretreated tool into a diamond suspension with a mass fraction of 10% by ultrasonic for 30 minutes, take out distilled water for cleaning, and blow dry;

[0046] S114. Heating wire pretreatment: T...

Embodiment 2

[0052] In this embodiment 2, a TiC-Co tool is used as a substrate, and the method for preparing a diamond / diamond-like carbon multilayer composite coating on the substrate includes the following steps:

[0053] S21. Provide a substrate, perform surface pretreatment on the substrate and then load it into a furnace; specifically,

[0054] S211. Put the TiC cutter into the acetone solution for ultrasonic cleaning for 20 minutes, and dry for 10 minutes in a constant temperature drying oven at 70°C;

[0055] S212. Put the cleaned carbide tool into K 3 [Fe(CN) 6 ]+KOH+H 2 O(wt%=1:1:10) Alkali mixture was ultrasonicated for 15min, and the distilled water was removed for cleaning, and then H 2 SO 4 +H 2 O 2 (vol%=1:10) Soak for 15s, take out the distilled water for cleaning, and dry at 60°C at constant temperature for 20min;

[0056] S213. Put the pretreated tool into a diamond suspension with a mass fraction of 8% by ultrasonic for 45 minutes, remove distilled water for cleaning, and blow dry...

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Abstract

The invention is suitable for the technical field of vacuum coating, and provides a preparation method of a diamond / diamond-like multilayer composite coating. The preparation method includes the following steps that a base is provided, and after surface pretreatment is performed on the base, the base is contained in a furnace; under the vacuum condition, methane is introduced, the first coating process is performed, and a diamond coating is deposited on the surface of the base; and under the vacuum condition, the heating temperature and the methane concentration are adjusted to perform the second coating process, and a diamond-like coating is deposited on the surface of the diamond coating; and the first coating process and the second coating process are repeated to prepare a multilayer composite structure with diamond layers and diamond-like layers alternately deposited is prepared, and the outermost layer of the obtained diamond / diamond-like multilayer composite coating is the diamond-like coating.

Description

Technical field [0001] The invention belongs to the technical field of vacuum coating, and particularly relates to a diamond / diamond-like carbon multilayer composite coating and a preparation method thereof. Background technique [0002] Diamond is currently the hardest material known in nature (HV=100Gpa). It has excellent thermal conductivity, low friction and super wear resistance. It is an ideal tool coating material. At present, diamond coatings are mostly prepared by hot-wire chemical deposition (HFCVD) method, which has relatively mature technology and low production cost, and is suitable for industrial production. However, due to the strong covalent bond characteristics of diamond and the film forming process characteristics of HFCVD, the diamond coating has the shortcomings of high coating stress and poor toughness, which reduces the performance of the diamond coating. Diamond-like carbon (DLC) is a kind of 2 And sp 3 Amorphous carbon material with bonding characteristi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/44C23C16/27C23C16/52
CPCC23C16/271C23C16/52
Inventor 唐永炳蒋春磊张静
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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