Terahertz subwavelength resolution imaging device

An imaging device and terahertz technology, applied in the field of terahertz imaging, can solve problems such as slow imaging speed, achieve fast imaging speed, high imaging resolution, and overcome slow imaging speed

Active Publication Date: 2017-05-31
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The transmission-type sub-wavelength resolution terahertz imaging device can overcome the problem of slow imaging speed of the probe scanning device, and can quickly obtain information such as the surface morphology of the sample and the terahertz wave transmission fingerprint spectrum of the sample, which is useful for material characterization, biomedicine Imaging, providing effective methods for semiconductor device inspection

Method used

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  • Terahertz subwavelength resolution imaging device
  • Terahertz subwavelength resolution imaging device
  • Terahertz subwavelength resolution imaging device

Examples

Experimental program
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Embodiment

[0025] Example detection device 1:

[0026] Use the commercial Agilent microwave source 2 to provide the fundamental frequency, and use the terahertz solid-state frequency doubling source to generate 0.15-0.20THz terahertz waves through 12 frequency doubling; focus the terahertz waves through the off-axis parabolic mirror 4 and the PE focusing lens group 5, and obtain Terahertz quasi-plane wave;

[0027] The polyurethane absorbing material 10 is installed on the box equipped with the preamplifier and the readout circuit 11. The polyurethane absorbing material 10 is a prismatic protrusion array, which is used to absorb the incident terahertz wave and reduce the interference of the reflected wave; the surface of the polyurethane material is oxidized The aluminum substrate sheet 9 is used to fix the linear terahertz device 8 and lead out electrical signals; the linear terahertz device 8 is used to receive the incident terahertz quasi-plane wave signal, and the linear device is a ...

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Abstract

The invention discloses a terahertz subwavelength resolution imaging device. In order to solve the problems in the prior art, the invention provides a terahertz wave near-field detection subwavelength resolution imaging device; the imaging device can improve the space resolution of terahertz wave near-field imaging to the order of magnitude higher than 0.02 lambda, thus improving the near-field imaging quality, and expanding the application field of a terahertz near-field imaging technology. The imaging device comprises a control computer, a frequency-adjustable terahertz solid-state frequency multiplier source with frequency of 0.15-0.5THz, an off-axis paraboloid mirror, a polyethylene (PE) focusing lens, a polytetrafluoroethylene sample pool, a polyethylene terephthalate (PET) protection sheet, a linear column terahertz detector, a polyurethane absorbing layer, a pre-amplifier, a reading circuit, an analog-digital (AD) converter, and the like. The terahertz subwavelength resolution imaging device is applied to the technical field of terahertz imaging.

Description

technical field [0001] The invention relates to the field of terahertz imaging, and relates to a terahertz sub-wavelength resolution imaging device. Background technique [0002] Terahertz (Terahertz / THz) waves refer to electromagnetic waves with frequencies in the range of 0.1-10THz (wavelength 30-3000μm), which have the characteristics of low energy, coherence, broadband and penetration. Because of these unique properties, terahertz waves have wide application potential in the fields of communication, astronomy, medical imaging, non-destructive testing and security, and have become a research hotspot at home and abroad in recent years. One of the important research contents of the development of terahertz technology is terahertz detection technology. The development of terahertz detectors with high working sensitivity, convenient use and reasonable cost will be used in biomedicine and chemistry, environmental monitoring, astronomy and remote sensing, communication technolo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3581G01N21/3563
CPCG01N21/3563G01N21/3581G01N2021/3568
Inventor 黄志明周炜姚娘娟曲越吴敬高艳卿黄敬国张飞尹一鸣褚君浩
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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