Three-dimensional vertical light-coupling mode conversion-isolation hybrid device
A technology of vertical coupling and composite device, applied in the field of optical communication, can solve the problems of unproposed, large size, difficult process manufacturing, etc., and achieve the effect of convenient three-dimensional integration, small device size, and simple process
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[0030] The optical mode conversion-isolation composite device and its manufacturing process involved in the present invention are as follows: Figure 5 As shown, the specific steps are as follows:
[0031] 1) Choose silicon as the substrate, first wash the silicon wafer with acetone solution to remove organic impurities on the surface of the silicon wafer, then wash with ethanol solution to remove the residual acetone from the previous cleaning step, and rinse repeatedly with deionized water to remove the residual ethanol on the surface of the silicon wafer . A PMMA-GMA cladding layer with a thickness of 4 μm was evenly spin-coated on the cleaned silicon substrate (rotating speed 3000 r / min, refractive index 1.49), and heated and cured at 120° C. for 120 minutes.
[0032] 2) Spin-coated core layer PMMA-GMA core layer material: Spin-coat a PMMA-GMA core layer with a thickness of 3.4 μm on the spin-coated PMMA-GMA cladding layer (rotating speed 3500r / min, refractive index 1.51)...
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