Vacuum-semiconductor hybrid photoelectric detector

Abstract

The invention discloses a vacuum-semiconductor hybrid photoelectric detector. The vacuum-semiconductor hybrid photoelectric detector includes an input light window, a photoelectric cathode, a ceramic ring, a focusing device, a semiconductor detector, an anode pedestal and a signal output apparatus, wherein the photoelectric cathode is fixed on the input light window; the semiconductor detector is fixed on the signal output apparatus; the signal output apparatus is fixed on the anode pedestal; the focusing device is arranged between the photoelectric cathode and the semiconductor detector; and distance control and insulation can be realized through the ceramic ring between the input light window and the focusing device, and between the focusing device and the anode pedestal. The vacuum-semiconductor hybrid photoelectric detector organically integrates a vacuum device with a semiconductor device, and has the advantages of being large in the detection photosensitive area, being flexible in response to spectrum, being high in the response speed, being large in the dynamic range, being high in gain, being low in dark count, being simple in processing, being convenient in assembling, being low in cost, and being high in reliability.

Description

technical field [0001] The invention relates to a photodetector, in particular to a vacuum-semiconductor hybrid photodetector. Background technique [0002] Photoelectric detection has broad application prospects and great strategic value, and has become a technical field vigorously developed by various countries. Among many photodetectors, the hybrid photodetector is a new type of photodetector developed in the 1990s, which combines the advantages of vacuum photoelectric devices and semiconductor photoelectric devices, and makes up for the shortcomings and deficiencies of both. It is used in high-energy physics, medical instruments, biological detection, quantum communication, astronomical observation and laser ranging and other fields. [0003] The whole tube of the hybrid photodetector adopts the metal-ceramic structure of the vacuum photoelectric device, the cathode adopts the photocathode of the vacuum device, and the anode is a semiconductor detector. During operatio...

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Problems solved by technology

[0004] At present, hybrid devices at home and abroad generally have problems such as small detection area and non-universal device structure. Most of the hybrid devices do not use electron optical systems or the electron optical systems used have low reduction magnifications, which cannot meet the needs of large-scale applications. Detection requirements, and the structures of these devices are customized, which cannot be applied to the needs of different photocathodes and different types of semiconductor detectors

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