Method for preparing surface SiC-C coating of carbon material in graphite-heating-element furnace

Abstract

The invention relates to a method for preparing a surface laminated SiC-C coating of a carbon material in a graphite-heating-element heating furnace. The method is characterized by comprising the steps: vacuumizing the graphite-heating-element heating furnace subjected to high-temperature treatment, and heating the graphite-heating-element heating furnace to 1,100 DEG C to 1,250 DEG C; then, introducing argon gas into the heating furnace, starting to introduce hydrogen gas into the heating furnace 15 to 30 minutes later, and starting to introduce trichloromethylsilane (MTS) into the heating furnace 15 to 30 minutes later when the internal environment of the furnace is stable; carrying out a chemical vapor deposition reaction in the furnace for 5 to 10 hours, then, stopping to introduce trichloromethylsilane, starting to introduce propylene gas into the heating furnace 15 to 30 minutes later, carrying out a gas-phase reaction to pyrolyze a carbon interface layer, and continuing to introduce the hydrogen gas and the argon gas according to original gas flow; stabilizing the furnace inside temperature to 900 DEG C to 1,100 DEG C, stopping to introduce the propylene gas 1 to 5 hours later, introducing trichloromethylsilane into the heating furnace again 15 to 30 minutes later, and continuing to carry out a reaction, so as to deposit an SiC coating; and carrying out repeated deposition on the SiC coating and the C interface layer for 5 to 10 times in this way, thereby obtaining the surface laminated SiC-C coating of the carbon material in the graphite-heating-element heating furnace. The chemical vapor deposited silicon carbide coating and the pyrolytic carbon layer are uniform and dense, and the protection and service life of the carbon material caused by the coating is prolonged due to the laminated structure.

Description

technical field [0001] The invention relates to a preparation method of a laminated coating, in particular to a preparation method of a laminated SiC-C coating on the surface of a carbon material in a graphite heating element heating furnace. Background technique [0002] Graphite has excellent electrical and thermal conductivity, and good high-temperature strength. Graphite is often used as a heating element in special industrial furnaces. With the overall development of the semiconductor industry, special graphite is used as the heating element for heating furnaces that refine single crystal silicon, single crystal germanium, gallium arsenide, indium phosphide and other materials. Some special industrial furnaces and experimental furnaces use carbon cloth or graphite cloth. as a heating element. In addition to graphite heating elements, carbon materials such as graphite crucibles and carbon insulation materials are widely used in special industrial furnaces, especially in...

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Problems solved by technology

[0005] (2) The silicon raw material also volatilizes during the melting and clarification process. The silicon vapor contacts the surface of the carbon material and reacts to form SiC. Due to the high growth temperature and the high concentration of silicon vapor, the SiC particles formed are also large and fall off during the cyclic heating process, resulting in Carbon material structural damage