A glass substrate air flotation device with deformation detection function and detection method

Abstract

The invention discloses a glass substrate air flotation device with deformation detection function. The device, the transport platform is provided with several uniformly arranged conveying air holes, the top of the conveying air holes is embedded with sintered metal porous material, and the bottom of the conveying air holes is connected with a gas transmission pipe, which is connected with a pressure reducing valve through a flow meter to reduce pressure. The valve is connected to the air source through a hose; at least two small holes are arranged around each conveying air hole of the transportation platform, the bottom of the small hole is connected to the pressure sensor through the air pipe, and the signal output end of the pressure sensor and the flow meter is converted with the input Module connection. The glass substrate air flotation device with deformation detection function of the present invention has the advantages of cleanliness, no pollution, no heat generation, no magnetism, etc., and the pneumatic system is easy to maintain and simple to construct.

Description

technical field [0001] The invention relates to a glass substrate air flotation device with deformation detection function and a detection method, belonging to the detection field. Background technique [0002] The traditional liquid crystal glass substrate transportation adopts the contact transportation method, that is, the workpiece is in direct contact with the surface of the transportation device (such as roller drive, vacuum suction cup, etc.), which is easy to cause scratches and cracks on the surface of the glass substrate, and there is also static electricity. And many problems such as metal pollution, which seriously affect the quality of products, can no longer meet the needs of current technological development. On the other hand, due to the restriction of frictional force, it is difficult to increase the transportation speed in this contact transportation method, which also limits the further improvement of production efficiency. At present, glass substrates ar...

AI Technical Summary

Problems solved by technology

[0007] Although the above-mentioned technical solutions can realize non-contact transportation of large glass substrates, none of them can realize real-time monitoring of glass substrate deformation.

In the glass substrate production line, if the glass quality needs to be inspected by machine vision, the deformation of the glass substrate caused by the pressure of the air film must be strictly controlled, otherwise, the bending deformation of the glass substrate will reduce the detection accuracy of defects

Usually, an external laser displacement sensor can detect the deformation of the glass substrate. However, the efficiency of large-scale detection is low and it is prone to large errors.

Increasing the number of laser displacement sensors can improve the efficiency of glass substrate deformation detection, but it also leads to a substantial increase in cost

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