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Double-layer grating polarizer applied to long wave infrared band

A long-wave infrared and grating polarization technology, which is applied in the direction of polarizing elements, can solve the problems of complex processing technology of magnesium fluoride coating 242, poor bonding strength of magnesium fluoride 242 and glass substrate 243, etc., and achieve the improvement of TM polarized light transmittance , design flexible effects

Inactive Publication Date: 2017-07-14
TIANJIN UNIV
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Problems solved by technology

like figure 2 D. Some researchers proposed to coat the magnesium fluoride film 242 between the substrate 243 and the grating lines 241. This method can effectively improve the theoretical transmittance and extinction ratio, but it faces two difficulties: the relationship between the magnesium fluoride 242 and the glass substrate The bonding firmness of 243 is poor; the processing technology of thicker magnesium fluoride coating 242 is complicated

Method used

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  • Double-layer grating polarizer applied to long wave infrared band
  • Double-layer grating polarizer applied to long wave infrared band
  • Double-layer grating polarizer applied to long wave infrared band

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Embodiment 1

[0040] In this embodiment, the effect of the material of the metal lines 231 in the grating region on the polarization performance of the grating is studied. The incident light 101 is infrared light with a wavelength of 10.6 μm, and the incident angle θ=0°; the grating substrate 233 is zinc selenide material, and the refractive index is 2.40. The cross section of the polarization grating lines 231 and 232 is rectangular, and the structural parameters are as follows: the depth h of the lines 232 of the transparent base material 1 = 0.4 μm, the depth h of the metal line 231 2=0.6 μm, the total depth of the grating area h=1 μm; grating period Λ=1 μm; grating duty cycle is the ratio of line width to period, f=w / Λ=0.5. image 3 A and image 3 B respectively represents the change of TM light transmittance and extinction ratio in the long-wave infrared band when the metal lines 231 are made of aluminum, gold, silver, and copper. When the material of the metal lines 231 in the grat...

Embodiment 2

[0042] In this embodiment, the effect of the grating period on the transmission diffraction efficiency is studied. This embodiment is a wire grid shape with regular lines and fixed gaps. Each parameter is as follows: incident light 101 is λ=7 μ m infrared light, incident angle θ=0 °; Grating substrate 233 is zinc selenide material, and refractive index is 2.42; Metal material 231 is aluminum (refractive index real part 16.78, imaginary part 77.71 ). The cross section of the polarization grating lines 231 and 232 is rectangular, and the depth of the lines 232 of the transparent base material is h 1 = 0.4 μm, the depth h of the metal line 231 2 =0.6 μm, the total depth of the grating area h=1 μm; the grating duty f=0.5. Figure 4 Contains the variation curve of the diffraction efficiency of each order with the period of the grating. Curve 401 represents 0-order reflection efficiency, curve 402 represents +1-order transmission efficiency, curve 403 represents -1-order transmi...

Embodiment 3

[0044] In this embodiment, the influence of the grating duty cycle on the polarization performance of the grating is studied. Each parameter is as follows: incident light 101 is λ=10.6 μm infrared light, incident angle θ=0 °; Grating substrate 233 is zinc selenide material, and refractive index is 2.40; Metal material 231 is aluminum (refractive index real part 33.91, imaginary part 109.42). The cross section of the polarization grating lines 231 and 232 is rectangular, and the depth of the lines 232 of the transparent base material is h 1 = 0.4 μm, the depth h of the metal line 231 2 =0.6 μm, the total depth of the grating area h=1 μm; grating period Λ=1 μm. The relationship between TM light transmittance and extinction ratio and duty cycle is as follows Figure 5 As shown, the duty ratio varies between 0.05 and 0.75. As the duty cycle increases, the extinction performance 502 of the grating increases; the TM light transmittance 501 first increases and then decreases duri...

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Abstract

The invention relates to the field of polarization imaging. In order to effectively reduce the difficulty in making high-performance polarized gratings of wide long-wave infrared band, the present invention aims to provide a method of over-etching a dielectric substrate layer under subwavelength metal gate lines, forming a metal / dielectric double layer structure in a grating region. The technical scheme adopted in the invention is that the double-layer grating polarizer applied to the long wave infrared band comprises a transparent substrate, convex lines, and metal lines, wherein the convex lines are made of the same material as the transparent substrate, and are identical in thickness and arranged uniformly; and the metal lines are identical in thickness and uniformly arranged. The convex lines of the same material as the transparent substrate and the metal lines have only one dimension difference in the spatial position, and one dimension refers to the thickness direction of the line. The convex lines of the same material as the transparent substrate and the metal lines form ridge-shaped and groove-shaped shapes of the fixed cycle and the fixed duty cycle with the space medium where the grating is located, and the grating cycle is smaller than the incident wavelength. The double-layer grating polarizer is mainly applied to the polarization imaging occasion.

Description

technical field [0001] The invention relates to the field of polarization imaging, in particular to a sub-wavelength grating with a double-layer structure, which can be applied to a long-wave infrared polarization imaging system. Specifically, it relates to a double-layer grating polarizer applied in the long-wave infrared band. Background technique [0002] With the development of detection and sensor technology, the accuracy and sensitivity of infrared detection instruments have been improved. However, the dependence of traditional infrared thermal imaging cameras on prior information and the difficulty of accurately distinguishing small temperature differences greatly limit their applicability. The polarization information of light (degree of polarization, polarization direction, polarization ellipticity, etc.), as light wave information independent of amplitude, phase, and frequency, has a unique supplementary role in navigation, water surface detection, and fuzzy commun...

Claims

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Application Information

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IPC IPC(8): G02B5/30
CPCG02B5/30
Inventor 黄战华马小青蔡怀宇张尹馨朱攀张亚男
Owner TIANJIN UNIV
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