Sintered object based on cubic boron nitride, and cutting tool constituted of sintered object based on cubic boron nitride
A cubic crystal boron nitride, boron nitride-based technology, applied in the manufacture of tools, workpieces, drilling accessories, etc., can solve the problems of easy chipping, short tool life, low hardness cBN sintered body, etc., to achieve excellent durability defective effect
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[0110] Production of cBN particle powder with high surface cleanliness:
[0111] Using cBN particles having a median diameter (D50) shown in Table 1 as a substrate, the cBN particles were coated with an AlN film having an average film thickness shown in Table 1 by the ALD (Atomic Layer Deposition) method. More specifically, cBN particles having a median diameter (D50) shown in Table 1 were loaded into the furnace, the temperature in the furnace was raised to 350° C., and Al(CH 3 ) 3 gas and the use of NH as a reactive gas 3 gas,
[0112] (1)Ar+Al(CH 3 ) 3 gas inflow process,
[0113] (2) Ar gas purification process,
[0114] (3)Ar+NH 3 gas inflow process,
[0115] (4) Ar gas purification process
[0116] The above (1) to (4) are defined as one cycle, and this cycle is repeated until the AlN film reaches the target film thickness. As a result, an AlN film having a predetermined film thickness is formed on the surface of the cBN particles.
[0117] In addition, as a r...
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