Multilayer vacuum sandwich one-dimensional photonic crystal film system structure
A dimensional photonic crystal and film structure technology, applied in optics, optical components, layered products, etc., can solve problems such as film system difficulties, and achieve the effects of good film quality, high repeatability, and good monitorability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0026] Such as figure 1 As shown, the multi-layer vacuum interlayer one-dimensional photonic crystal film system structure in this embodiment is formed by alternately stacking multi-layer high refractive index material film layers 1 and vacuum thin layers 2 with adjustable thickness, and two adjacent high refractive index material films are up and down A width adjuster 3 is arranged between the layers 1, and the vacuum thin layer 2 is distributed in the cavity formed by the width adjuster 3 and two adjacent upper and lower high refractive index material film layers 1, and the vacuum thin layer 2 is also An elastic support beam 4 is provided.
[0027] Wherein, the refractive index of the high refractive index material film layer 1 > the refractive index of the adjustable vacuum thin layer 2 . In this embodiment, the high refractive index material film layer 1 is a titanium dioxide thin layer 11 and a titanium dioxide thin layer 12, the refractive index of the titanium dioxide ...
Embodiment 2
[0030] Such as figure 2 As shown, in this embodiment, the high refractive index material film layer 1 is a thin layer of titanium dioxide 11 , a thin layer of tantalum pentoxide 12 and a thin layer of titanium trioxide 13 . Among them, the titanium dioxide thin layer 11 has a refractive index of 2.66 and a thickness of 3.25 microns, the tantalum pentoxide thin layer 12 has a refractive index of 2.12 and a thickness of 1.04 microns, and the titanium dioxide thin layer 13 has a refractive index of 2.27 and a thickness of 2.11 microns. The vacuum degree of the thin vacuum layer 2 is 1 Pa, and the thicknesses from top to bottom are 0.57 microns and 0.96 microns respectively.
[0031] All the other are with embodiment 1.
Embodiment 3
[0033] Such as image 3 As shown, in this embodiment, the high refractive index material film layer 1 is a thin layer of titanium dioxide 11 , a thin layer of tantalum pentoxide 12 , a thin layer of titanium trioxide 13 and a thin layer of zirconium dioxide 14 . The titanium dioxide thin layer 11 has a refractive index of 2.65 and a thickness of 3.12 microns, the tantalum pentoxide thin layer 12 has a refractive index of 2.11 and a thickness of 1.98 microns, and the titanium dioxide thin layer 13 has a refractive index of 2.33 and a thickness of 1.26 microns. The zirconium thin layer 14 has a refractive index of 2.20 and a thickness of 3.05 microns. The vacuum degree of the thin vacuum layer 2 is 0.1 Pa, and the thicknesses from top to bottom are 0.36 microns, 1.35 microns and 0.85 microns respectively.
[0034] All the other are with embodiment 1.
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


