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Multilayer vacuum sandwich one-dimensional photonic crystal film system structure

A dimensional photonic crystal and film structure technology, applied in optics, optical components, layered products, etc., can solve problems such as film system difficulties, and achieve the effects of good film quality, high repeatability, and good monitorability

Inactive Publication Date: 2017-08-22
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Conversely, however, given the required spectral profile, it is much more difficult to design the film system

Method used

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  • Multilayer vacuum sandwich one-dimensional photonic crystal film system structure
  • Multilayer vacuum sandwich one-dimensional photonic crystal film system structure
  • Multilayer vacuum sandwich one-dimensional photonic crystal film system structure

Examples

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Effect test

Embodiment 1

[0026] Such as figure 1 As shown, the multi-layer vacuum interlayer one-dimensional photonic crystal film system structure in this embodiment is formed by alternately stacking multi-layer high refractive index material film layers 1 and vacuum thin layers 2 with adjustable thickness, and two adjacent high refractive index material films are up and down A width adjuster 3 is arranged between the layers 1, and the vacuum thin layer 2 is distributed in the cavity formed by the width adjuster 3 and two adjacent upper and lower high refractive index material film layers 1, and the vacuum thin layer 2 is also An elastic support beam 4 is provided.

[0027] Wherein, the refractive index of the high refractive index material film layer 1 > the refractive index of the adjustable vacuum thin layer 2 . In this embodiment, the high refractive index material film layer 1 is a titanium dioxide thin layer 11 and a titanium dioxide thin layer 12, the refractive index of the titanium dioxide ...

Embodiment 2

[0030] Such as figure 2 As shown, in this embodiment, the high refractive index material film layer 1 is a thin layer of titanium dioxide 11 , a thin layer of tantalum pentoxide 12 and a thin layer of titanium trioxide 13 . Among them, the titanium dioxide thin layer 11 has a refractive index of 2.66 and a thickness of 3.25 microns, the tantalum pentoxide thin layer 12 has a refractive index of 2.12 and a thickness of 1.04 microns, and the titanium dioxide thin layer 13 has a refractive index of 2.27 and a thickness of 2.11 microns. The vacuum degree of the thin vacuum layer 2 is 1 Pa, and the thicknesses from top to bottom are 0.57 microns and 0.96 microns respectively.

[0031] All the other are with embodiment 1.

Embodiment 3

[0033] Such as image 3 As shown, in this embodiment, the high refractive index material film layer 1 is a thin layer of titanium dioxide 11 , a thin layer of tantalum pentoxide 12 , a thin layer of titanium trioxide 13 and a thin layer of zirconium dioxide 14 . The titanium dioxide thin layer 11 has a refractive index of 2.65 and a thickness of 3.12 microns, the tantalum pentoxide thin layer 12 has a refractive index of 2.11 and a thickness of 1.98 microns, and the titanium dioxide thin layer 13 has a refractive index of 2.33 and a thickness of 1.26 microns. The zirconium thin layer 14 has a refractive index of 2.20 and a thickness of 3.05 microns. The vacuum degree of the thin vacuum layer 2 is 0.1 Pa, and the thicknesses from top to bottom are 0.36 microns, 1.35 microns and 0.85 microns respectively.

[0034] All the other are with embodiment 1.

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Abstract

The invention relates to a multilayer vacuum sandwich one-dimensional photonic crystal film system structure. The structure is formed by alternately stacking a number of high refractive index material thin film layers and thickness adjustable vacuum thin layers. A width adjuster is arranged between upper and lower adjacent high refractive index material thin film layers. The vacuum thin layers are distributed in a cavity surrounded by the width adjuster and upper and lower adjacent high refractive index material thin film layers, and an elastic support beam is arranged in each adjustable vacuum thin layer. Compared with the prior art, the structure provided by the invention has the advantages that a stacked multilayer solid film system is converted into the combination of monofilms and vacuum layers (adjustable vacuum thin layers); the problem that the multilayer film system is difficultly plated and easily cracked is avoided; the thickness of the vacuum thin layers is adjusted, and the permeability is selected according to different photonic crystal structures, so that the acquired spectrum can be changed; and the effect of temperature changing is better.

Description

technical field [0001] The invention belongs to the technical field of photonic crystals, and relates to a multilayer vacuum interlayer one-dimensional photonic crystal film system structure. Background technique [0002] Photonic crystals are structures that are periodically arranged in space by materials with different dielectric constants. Photonic crystals can produce photonic band gaps under the appropriate dielectric constant ratio and lattice constant, and electromagnetic waves in the photonic band gap frequency range will not be able to pass through photonic crystals, and various optical effects can be produced. Therefore, Has a wide range of applications. [0003] The characteristic calculation of photonic crystal multilayer film system can be solved by a characteristic admittance matrix based on Maxwell's equation. Given the thickness and refractive index parameters of each layer of the film system, the characteristics of the film system and the spectrum of the f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/00B32B5/14B32B7/02B32B7/04
CPCB32B5/14B32B7/02B32B7/04G02B1/005
Inventor 沈诗雯李志远徐僖禧欧阳一平马汉青孙哲张志华
Owner TONGJI UNIV