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379 results about "Tantalum pentoxide" patented technology

Tantalum pentoxide, also known as tantalum(V) oxide, is the inorganic compound with the formula Ta₂O₅. It is a white solid that is insoluble in all solvents but is attacked by strong bases and hydrofluoric acid. Ta₂O₅ is an inert material with a high refractive index and low absorption (i.e. colourless), which makes it useful for coatings. It is also extensively used in the production of capacitors, due to its high dielectric constant.

Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures

The present invention relates to a method of etching tungsten or tungsten nitride in semiconductor structures, and particularly to the etching of gate electrodes which require precise control over the etching process. We have discovered a method of etching tungsten or tungsten nitride which permits precise etch profile control while providing excellent selectivity, of at least 175:1, for example, in favor of etching tungsten or tungsten nitride rather than an adjacent oxide layer. Typically, the oxide is selected from silicon oxide, silicon oxynitride, tantalum pentoxide, zirconium oxide, and combinations thereof. The method appears to be applicable to tungsten or tungsten nitride, whether deposited by physical vapor deposition (PVD) or chemical vapor deposition (CVD). In particular, an initial etch chemistry, used during the majority of the tungsten or tungsten nitride etching process (the main etch), employs the use of a plasma source gas where the chemically functional etchant species are generated from a combination of sulfur hexafluoride (SF6) and nitrogen (N2), or in the alternative, from a combination of nitrogen trifluoride (NF3), chlorine (Cl2), and carbon tetrafluoride (CF4). Toward the end of the main etching process, a second chemistry is used in which the chemically functional etchant species are generated from Cl2 and O2. This final portion of the etch process may be referred to as an "overetch" process, since etching is carried out to at least the surface underlying the tungsten or tungsten nitride. However, this second etch chemistry may optionally be divided into two steps, where the plasma source gas oxygen content and plasma source power are increased in the second step.
Owner:APPLIED MATERIALS INC

High-entropy rare earth niobium/tantalum/molybdate ceramic and preparation method thereof

ActiveCN112830782ALow thermal conductivity at room temperatureBig spaceAir atmosphereMolybdic acid
The invention relates to the technical field of high-entropy ceramic materials, and particularly provides high-entropy rare earth niobium / tantalum / molybdate ceramic and a preparation method thereof. The chemical formula of the high-entropy rare earth niobium / tantalum / molybdate ceramic is RE3(Nb1 / 3Ta1 / 3Mo1 / 3)O7, RE is any 3-7 different elements of Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Yb and Lu. The preparation method comprises the following steps of (1) weighing rare earth oxide, niobium pentoxide, tantalum pentoxide, molybdenum trioxide and molybdenum dioxide according to a stoichiometric ratio, (2) adding a solvent and a ball-milling medium, ball-milling and mixing the raw materials by adopting a wet method, and carrying out vacuum drying and sieving to obtain uniformly mixed powder, (3) placing the uniformly mixed powder in a stainless steel mold for hydraulic compaction, and then carrying out cold isostatic pressing to obtain a densified green body, and (4) putting the green body into an alumina crucible, putting the alumina crucible into a high-temperature sintering furnace, and sintering in an air atmosphere. The prepared high-entropy ceramic is low in heat conductivity, the adopted preparation method has the advantages of being simple and rapid in process, low in equipment requirement, low in energy consumption, high in controllability and the like, and large-scale production is easy to achieve.
Owner:SHANDONG UNIV

Group VB doping CaCu3Ti4O12 based pressure sensitive material and preparation method

InactiveCN101880159AIncrease intrinsic conductanceReduce the voltage gradientLow voltageChemical element
The invention discloses a group VB doping CaCu3Ti4O12 based pressure sensitive material and a preparation method. The general chemical composition formula of the group VB doping CaCu3Ti4O12 based pressure sensitive materia is CaCu3Ti4-xBxO12, wherein B represents one or combination of group VB elements in the periodic table of chemical elements, and x=0.001-1. The preparation method comprises thefollowing steps of compounding calcium carbonate, copper oxide, vanadium pentoxide, niobium pentaoxide and tantalum pentoxide in accordance with the stoichiometric ratio of CaCu3Ti4-xBxO12 (x=0.001-1, and B represents one or combination of group VB elements in the periodic table of chemical elements), ball milling, calcining, secondary ball milling, pelleting, forming, binder removing, high temperature sintering and the like so that Ca, Cu, Ti-O based ceramics with high permittivity and high pressure sensitive feature can be finally prepared. The invention compensates valence changes of copper ions and titanium ions in the sintering process, which can cause low voltage gradient and large leakage current, by partially replacing a +4 Ti element with a +5 element, thereby reducing the intrinsic conductivity of materials and improving the voltage gradient of the materials.
Owner:GUILIN UNIVERSITY OF TECHNOLOGY

Garnet-structure lithium lanthanum tantalate-based solid electrolyte material and preparation method thereof

The invention discloses a garnet-structure lithium lanthanum tantalate-based solid electrolyte material and a preparation method thereof. The lithium lanthanum tantalate-based solid electrolyte material is a compound of Li5La3Ta2O12 doped at the lanthanum site and/or tantalum site; and the preparation method comprises the following steps: dissolving tantalum pentoxide in a H2C2O4 solution; adding lithium salt and lanthanum slat and the salt of a lanthanum site-doped compound and/or the salt of a tantalum site-doped compound, and mixing to obtain a solution; adding EDTA into the obtained mixed solution for reaction until transparent and clear sol appears; adding a water-soluble high-molecular polymer and continuously reacting until gel appears; drying the obtained gel and calcining; performing mould pressing of the calcined particles to obtain a blank; and further calcining the blank to obtain the solid electrolyte material. The preparation method is mild in conditions, simple in process and simple to operate, and can realize industrial production; the prepared solid electrolyte material has good electrochemical stability and relatively high electrical conductivity, and can be used for preparing an all-solid-state lithium ion battery.
Owner:CENT SOUTH UNIV

Large-scale preparation and lithium battery application of vanadium pentoxide and carbon nano composite thereof

The invention discloses large-scale preparation and lithium battery application of vanadium pentoxide and carbon nano composite thereof, and belongs to the technical field of functional nano material preparation. The preparation method comprises the following steps: dissolving vanadium pentoxide solid powder in pure water, mixing with hydrogen peroxide, obtaining a scarlet solution, and preserving the temperature of the solution for a period of time to become a colloidal sol; carrying out freeze drying treatment on the colloidal sol to obtain a three-dimensional self-supporting solid; and taking partial solid to be calcinated under nitrogen atmosphere so as to obtain a vanadium pentoxide nano material. The corresponding solid is added into composite carbon nano tube and graphene as long as the scarlet solution is obtained, and the mixture is dispersed uniformly without changing remaining operation. The lithium battery positive electrode material prepared in the method is long in service life, high in capacity and stable in cycle performance. The whole technological process is simple, the price of raw materials is low, no toxic product is generated, the energy consumption is low, and the material is green and environmentally-friendly, so that the disadvantage that existing lithium battery materials are high in production cost, complex in process and great in byproduct toxicity is overcome, and the material is applicable to industrial large-scale production.
Owner:NANJING UNIV OF TECH

Nano functional ceramic material and preparation method thereof

The invention provides a nano functional ceramic material, and in particular relates to a nano functional ceramic material with an ABO3 perovskite structure and a method for preparing the material. The method comprises the following steps: preparing an organic solvent solution of alkali metal hydroxide; adding the weighed organic solvent solution in a polytetrafluoroethylene lining of a reaction kettle, and stirring; adding weighed niobium pentaoxide powder and tantalum pentoxide powder in the polytetrafluoroethylene lining according to the chemical dose proportion of a ceramic material molecular formula and the concentration and volume of an organic solvent, and then continuing to stir; putting the polytetrafluoroethylene lining in a stainless steel hydro-thermal reaction kettle for a solvent heat reaction so as to obtain a precipitate; and processing the obtained precipitate so as to obtain A(NbxTa1-x)O3 nano powder. In the method, the characteristics of the organic solvent are fully utilized, the ceramic powder is synthesized under the milder conditions; the powder has the advantages of good dispersibility and uniformly distributed crystallite dimension; the steps are simple and easy to operate and achieve; and the synthesis conditions are mild, thus being convenient for industrial production.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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