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Transmission shaft for laser scribing machine

A laser dicing machine and transmission shaft technology, which is applied in the field of microelectronic machinery, can solve the problems of short service life of the transmission shaft, increased production cost, and the transmission shaft does not have good friction resistance, heat resistance and oxidation resistance, etc. Long, good anti-oxidation performance, the effect of reducing production cost

Inactive Publication Date: 2017-09-01
苏州光宝科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the application of semiconductor integrated circuits, wafers are the most critical technology, so laser scribing machines are widely used in wafer cutting technology, among which industrial laser scribing machines are the most widely used, industrial laser scribing machines are generally It includes a laser head and a driving device that drives the laser head to move. The driving device includes a transmission shaft, so the performance requirements for the transmission shaft are relatively high, but the transmission shaft of the scribing machine in the prior art does not have good friction resistance , Heat resistance and anti-oxidation performance, resulting in a very short service life of the transmission shaft, the dicing machine has to be replaced after a period of use, thus increasing the production cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A transmission shaft for a laser scribing machine in this embodiment comprises 20 parts by weight of nickel, 2 parts of chromium, 1.5 parts of copper, 4.5 parts of scandium, 4 parts of manganese, 1 part of aluminum, 1 part of selenium and 66 parts of titanium.

[0023] A production method for a transmission shaft of a laser scribing machine, comprising the following steps:

[0024] 1) The alloy powder obtained by high-pressure nitrogen atomization method is molded, and cold isostatic pressing is performed under a pressure of 6kPa for 2.5 hours;

[0025] 2) The cold isostatic compact is extruded at 1200°C;

[0026] 3) Grinding the blank in step 2) by a grinder to make the required blank;

[0027] 4) performing annealing treatment on the billet in step 3);

[0028] 5) cold extruding the processed billet in step 4) on a press;

[0029] 6) Turn the outer circle of the workpiece processed in step 5) into the required shape on the CNC lathe.

[0030] Further, the anneali...

Embodiment 2

[0035] A transmission shaft for a laser scribing machine provided in this embodiment comprises 15 parts by weight of nickel, 2.5 parts of chromium, 2 parts of copper, 4 parts of scandium, 4.5 parts of manganese, 2 parts of aluminum, 1 part of selenium and 69 parts of titanium.

[0036] A production method for a transmission shaft of a laser scribing machine, comprising the following steps:

[0037] 1) adopt high-pressure nitrogen atomization method to obtain alloy powder and carry out mold pressing, cold isostatic pressing under 6.5kPa pressure, the time is 3h;

[0038] 2) The cold isostatic compact is extruded at 1300°C;

[0039] 3) Grinding the blank in step 2) by a grinder to make the required blank;

[0040] 4) performing annealing treatment on the billet in step 3);

[0041] 5) cold extruding the processed billet in step 4) on a press;

[0042] 6) Turn the outer circle of the workpiece processed in step 5) into the required shape on the CNC lathe.

[0043] The anneal...

Embodiment 3

[0048] According to the weight ratio, it includes 25 parts of nickel, 1.5 parts of chromium, 1 part of copper, 5 parts of scandium, 5 parts of manganese, 2 parts of aluminum, 1.5 parts of selenium and 59 parts of titanium.

[0049] A production method for a transmission shaft of a laser scribing machine, comprising the following steps:

[0050] 1) The alloy powder obtained by high-pressure nitrogen atomization method is molded, and cold isostatic pressing is performed under a pressure of 7kPa for 3.5 hours;

[0051] 2) The cold isostatic compact is extruded at 1300°C;

[0052] 3) Grinding the blank in step 2) by a grinder to make the required blank;

[0053] 4) performing annealing treatment on the billet in step 3);

[0054] 5) cold extruding the processed billet in step 4) on a press;

[0055] 6) Turn the outer circle of the workpiece processed in step 5) into the required shape on the CNC lathe.

[0056] Further, the annealing treatment in the step (4) includes the foll...

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PUM

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Abstract

The invention discloses a transmission shaft for a laser scribing machine. The transmission shaft for the laser scribing machine comprises, by weight, 10-30 parts of nickel, 1-3 parts of chrome, 1-2 parts of copper, 4-5 parts of scandium, 3-6 parts of manganese, 1-2 parts of aluminum, 0.5-1.5 parts of selenium and 50-70 parts of titanium. A transmission wheel high in strength, resistant to friction, good in oxidation resistance and long in use cycle is obtained through the powder metallurgy technology and annealing treatment, and thus the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of microelectronic machinery, in particular to a transmission shaft for a laser scribing machine. Background technique [0002] In the application of semiconductor integrated circuits, wafers are the most critical technology, so laser scribing machines are widely used in wafer cutting technology, among which industrial laser scribing machines are the most widely used, industrial laser scribing machines are generally It includes a laser head and a driving device that drives the laser head to move. The driving device includes a transmission shaft, so the performance requirements for the transmission shaft are relatively high, but the transmission shaft of the scribing machine in the prior art does not have good friction resistance , heat resistance and anti-oxidation performance, resulting in a very short service life of the transmission shaft, the dicing machine has to be replaced after a period of use, there...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C14/00C22C1/04C22F1/18B22F3/04B22F3/20B22F3/24
CPCC22C14/00B22F3/04B22F3/20B22F3/24B22F2003/208C22C1/0458C22F1/183
Inventor 郭勇张展嘉
Owner 苏州光宝科技股份有限公司