Diamond-like carbon thin film physical film removal method and film removal equipment

Abstract

The invention discloses a diamond-like carbon film physical film removing method and equipment. The diamond-like carbon film physical film removing method at least comprises a reaction film removing process. According to the reaction film removing process, in a coarse vacuum environment, reactant gas with strong oxidizing property is induced by a set power supply to generate electrified plasma, and the electrified plasma reacts with a diamond-like carbon film layer by layer. According to the diamond-like carbon film physical film removing method, the process is simple, the physical mechanism is utilized to remove the film, the strong oxidizing property of the continuously generated electrified plasma is utilized, and the electrified plasma is dragged by an electromagnetic field to be adsorbed on the surface of a coating and reacts with the diamond-like carbon film so as to remove the film. During the entire film removing process, a chemical agent is not needed, surface defects and roughness increase of a base material are avoided, the basic size is not affected, and the texture property is not changed, so that the characteristics of zero damage, high convenience and efficiency, low cost, controllable process, environmental protection and the like are realized.

Description

technical field [0001] The invention relates to a film-removing method and film-removing equipment, in particular to a diamond-like film physical film-removing method and film-removing equipment. Background technique [0002] Conventional diamond-like carbon (DLC) film, its functional layer is mainly composed of carbon elements, and contains a small amount of hydrogen elements, the microstructure contains carbon SP2, SP3 bonds, taking into account the two structures of diamond and graphite, and the performance shown macroscopically It not only inherits the relatively stable chemical properties of diamond and the physical properties of hard material; it also includes the physical properties of self-lubricating graphite surface, so it is widely used in many parts that require wear resistance and hardness. [0003] Therefore, from the perspective of these two aspects, once the DLC film is coated on the workpiece, it is difficult to effectively remove it through mechanical grind...

AI Technical Summary

Problems solved by technology

[0003] Therefore, from the perspective of these two aspects, once the DLC film is coated on the workpiece, it is difficult to effectively remove it through mechanical grinding or polishing in the subsequent process. Even if it can be removed, it will take a lot of time and manpower. Material resources and cost are unbearable; especially when batch products have quality problems and need to be reworked, this disadvantage is particularly prominent

Images