Cylindrical sintered body, cylindrical sputtering target, and method for producing the same
A technology of composition and resist, which is applied in the field of display devices, can solve problems such as difficulty in ensuring the performance of photoresist stripper, increased process loss, and high volatilization, and achieves the effect of excellent cumulative processing sheet number characteristics
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Embodiment 1~14 and comparative example 1
[0087] Examples 1-14 and Comparative Examples 1-4: Manufacture of resist stripping liquid composition
[0088] The components of the content described in following Table 1 were mixed, and the resist stripping liquid composition was manufactured.
[0089] [Table 1] (unit: weight %)
[0090]
[0091] BEEM: bis(2-ethoxyethoxy)methane
[0092] BMEM: bis(2-methoxyethoxy)methane
[0093] BBEM: bis(2-butoxyethoxy)methane
[0094] TDME: Triethylene glycol dimethyl ether
[0095] MEDG: Diethylene glycol methyl ether
[0096] DGA: diglycolamine
[0097] MEA: Monoethanolamine
[0098] HEP: Hydroxyethylpiperazine
[0099] TMAH: Tetramethylammonium Hydroxide
[0100] NMP: N-Methylpyrrolidone
[0101] THFA: tetrahydrofurfuryl alcohol
[0102] EDG: Diethylene glycol monoethyl ether
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