Machining method for tin target

A processing method and tin target technology, which is applied in metal processing equipment, metal processing machinery parts, manufacturing tools, etc., can solve the problems of reduced performance of tin targets and high surface roughness of tin targets, and achieve good lubrication and cooling effects And good lubrication effect, improve the effect of process efficiency

Inactive Publication Date: 2017-10-31
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, the surface roughness of currently formed tin targe

Method used

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  • Machining method for tin target
  • Machining method for tin target
  • Machining method for tin target

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Experimental program
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Effect test

Embodiment Construction

[0033] As mentioned in the background art, currently formed tin targets have relatively high surface roughness, which degrades the performance of the tin targets.

[0034] In one embodiment, during the machining process of the tin workpiece, a cutting fluid is poured into the cutting area of ​​the tin workpiece, and the material of the cutting fluid is grease.

[0035] The function of cutting fluid includes lubrication and cooling.

[0036] The research found that the roughness of the tin target formed by the method of the above embodiment is high because:

[0037] Tin is a kind of soft metal material. When the tin workpiece is machined, the tin workpiece is very easy to deform and has a large friction with the corresponding tool, so that the tin adheres to the tool used; at the same time , due to the deformation and friction of the tin workpiece, a large amount of heat will be generated, making the surface of the tin workpiece softer, which intensifies the degree of tin adhe...

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Abstract

The invention provides a machining method for a tin target. The method comprises the steps that a tin workpiece is provided; and the tin workpiece is machined, and cutting fluid is sprayed to the tin workpiece through a spray cooling process when the tin workpiece is machined. Due to the fact that the spray cooling process is adopted when the tin workpiece is machined, the tool sticking degree of the tin workpiece is lowered, and the surface roughness of the formed tin target is lowered.

Description

technical field [0001] The invention relates to the field of target preparation, in particular to a processing method for a tin target. Background technique [0002] The target is a sputtering source that forms various functional thin films on the substrate by sputtering under appropriate process conditions through magnetron sputtering, multi-arc ion plating or other types of coating systems. [0003] The quality of functional thin films formed on substrates by sputtering methods is affected by the surface roughness of the target used for sputtering. When protrusions with a size exceeding a certain level exist on the target surface, abnormal discharge (micro-arc discharge) may be generated on the protrusions. The abnormal discharge can cause large particles to be sputtered from the surface of the target and deposited on the substrate, thereby forming spots on the film, which cannot meet the production requirements of the functional film. Therefore, the roughness of the tar...

Claims

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Application Information

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IPC IPC(8): B23P13/02B23Q11/10
CPCB23P13/02B23Q11/1076Y02P70/10
Inventor 姚力军潘杰相原俊夫大岩一彦王学泽梁泽民
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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