A polycrystalline silicon reduction tail gas condensation method and system
A condensation system and polysilicon technology are applied in the field of condensation of polysilicon reduction tail gas and polysilicon reduction tail gas condensation system. cooling effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0042] This embodiment provides a method for condensing polysilicon reduction tail gas, which is used to condense and separate the reduction tail gas in the polysilicon production process. The reduction tail gas includes hydrogen, hydrogen chloride gas and gas phase chlorosilane, and the gas phase chlorosilane includes A mixture of silicon, trichlorosilane and dichlorodihydrosilane.
[0043] Such as figure 1 As shown, the condensation method includes the following steps S101 to S107.
[0044] Step S101. Using ambient air to cool the reduction tail gas to obtain the reduction tail gas after cooling for the first time.
[0045] In this step, the temperature range of the reduction tail gas is 80-200°C. The reduction tail gas in this temperature range is obtained after preliminary cooling treatment of the reduction tail gas output from the reduction furnace. Otherwise, the outlet temperature of the reduction furnace is too high, and the Conducive to later recycling.
[0046] Sp...
Embodiment 2
[0069] This embodiment provides a polysilicon reduction tail gas condensation system, which is used to condense and separate the reduction tail gas in the polysilicon production process. The reduction tail gas includes hydrogen, hydrogen chloride gas and gaseous chlorosilane, and the gaseous chlorosilane includes A mixture of silicon, trichlorosilane and dichlorodihydrosilane.
[0070] Such as figure 2 As shown, the condensing system includes an air cooler E1, a chlorosilane heat exchanger E2, an air-air heat exchanger E3, a frozen brine heat exchanger E4, a deep cooler E5, a first chlorosilane separation tank V1 and a second chlorine Silane separation tank V2, the above equipment is connected by pipeline, and the connection between pipeline and each equipment is connected by flange.
[0071] Wherein, the air cooler E1 is used to cool the reduction tail gas with ambient air, and output the reduction tail gas after the first cooling.
[0072] In this embodiment, the temperat...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 

