A wet etching method, a double-sided solar cell and a manufacturing method thereof

Abstract

The invention discloses a wet etching method, a double face solar cell, and a manufacturing method of the double face solar cell. The wet etching method includes the steps: controlling a phosphorosilicate glass layer of the substrate structure to be immersed into the first etching liquid, exposing a boron diffusion layer and a borosilicate glass layer, removing the phosphorosilicate glass layer, with no influence on the boron diffusion layer and the borosilicate glass layer; inverting two surfaces of the substrate structure, controlling an edge phosphorus diffusion layer, a boron diffusion layer and a borosilicate glass layer of the substrate structure to be immersed into the second etching liquid, and exposing the phosphorus diffusion layer, with no influence on the boron diffusion layer because of the protection effect of the borosilicate glass layer on the boron diffusion layer; and controlling the borosilicate glass layer of the substrate structure to be immersed into the third etching liquid, exposing the phosphorus diffusion layer, with no influence on the phosphorus diffusion layer, and finally achieving the aim of etching. Through wet etching and by controlling the substrate structure to float in the etching liquid, the phosphorosilicate glass layer, the edge phosphorus diffusion layer and the borosilicate glass layer are gradually removed, thus guaranteeing that the photoelectric conversion efficiency of the double face solar cell is high.

Description

technical field [0001] The invention relates to the technical field of solar cell manufacturing, and more specifically, to a wet etching method, a double-sided solar cell and a manufacturing method thereof. Background technique [0002] Conventional fossil fuels are increasingly exhausted. Among the existing sustainable energy sources, solar energy is undoubtedly a clean, common and high-potential alternative energy source. A solar cell, also known as a photovoltaic cell, is a semiconductor device that converts the sun's light energy directly into electrical energy. Because it is a green environmental protection product, it will not cause environmental pollution, and solar energy is a renewable resource, so in the current energy shortage situation, solar cells are a new energy source with broad development prospects, and have received extensive attention. [0003] Compared with single-sided solar cells, double-sided solar cells have advantages such as higher photoelectric c...

AI Technical Summary

Problems solved by technology

Existing double-sided solar cells often diffuse a boron diffusion layer on one surface of the substrate silicon wafer, then diffuse a phosphorus diffusion layer on the other surface of the substrate silicon wafer, and in the process of double-sided diffusion of the substrate silicon wafer , borosilicate glass, phosphosilicate glass, and unnecessary diffusion layer at the edge of the substrate silicon wafer will be formed. At present, laser etching process or plasma etching process is mainly used to remove it, but the above etching process will bring Due to the decline in the photoelectric conversion efficiency of double-sided solar cells and other issues

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