Machining method of silver target material

A processing method and silver target technology, which is applied in metal processing equipment, workpieces, manufacturing tools, etc., can solve the problems of silver target easy to produce lines, silver target performance degradation, and high roughness, so as to improve the quality of the processed surface and Effects of tool life, friction reduction, and surface roughness reduction

Inactive Publication Date: 2017-12-15
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, at present, the surface of the silver target is prone to tex

Method used

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  • Machining method of silver target material
  • Machining method of silver target material
  • Machining method of silver target material

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Experimental program
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Embodiment Construction

[0030] As mentioned in the background art, there are many problems in the current method of forming the silver target, for example, the surface roughness of the formed silver target is relatively high, which reduces the performance of the silver target.

[0031] Now in combination with a method of forming a silver target, the reason why the performance of the silver target is reduced due to the high surface roughness of the silver target formed by the formation method is analyzed:

[0032] The hardness of the silver target is low, and the parameter selection is unreasonable in the turning process, which will easily lead to the deformation of the silver target and the surface of the silver target is easy to produce lines, so that the surface roughness of the silver target is high, making the silver target Reduced performance. In addition, the hardness of the silver target is low. During the turning process, more chips are generated. The chips are easy to cause the tool to gener...

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Abstract

The invention provides a machining method of a silver target material. The machining method comprises the steps of providing a silver workpiece; and carrying out turning machining on the surface of the silver workpiece, wherein turning machining comprises finish machining, and the feed amount of finish machining is smaller than 0.055 mm/turn. According to the machining method, the cutter penetration amount of turning machining is relatively small, feeding force of a cutter for the silver workpiece is relatively small, patterns are not liable to generate on the surface of the silver workpiece, the surface patterns of the silver workpiece can be decreased, and surface roughness of the silver workpiece is reduced; and besides, the feed amount is relatively small, cut chips are not liable to crimp, friction between the chips and the silver workpiece can be reduced, and surface roughness of the silver workpiece is further reduced.

Description

technical field [0001] The invention relates to the field of target preparation, in particular to a processing method for a silver target. Background technique [0002] The target is a sputtering source that forms various functional thin films on the substrate by sputtering under appropriate process conditions through magnetron sputtering, multi-arc ion plating or other types of coating systems. [0003] The quality of functional thin films formed on substrates by sputtering methods is affected by the surface roughness of the target used for sputtering. When lines with a size exceeding a certain level exist on the surface of the target, abnormal discharges (micro-arc discharges) may be generated on the protrusions. The abnormal discharge may cause large particles to be sputtered from the surface of the target and deposited on the substrate, thereby forming spots on the thin film, which cannot meet the production requirements of the functional thin film. Therefore, the roug...

Claims

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Application Information

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IPC IPC(8): B23B1/00C23C14/35
CPCB23B1/00B23B2200/28B23B2200/325B23B2220/24B23B2222/28B23B2222/76B23B2226/31C23C14/35
Inventor 姚力军潘杰相原俊夫王学泽李力平
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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