Synthesis method of tungsten hexafluoride

A technology of tungsten hexafluoride and synthesis method, which is applied in the direction of tungsten halide, etc., can solve the problems of low reaction efficiency, gas waste, limited contact area, etc., and achieve the effects of low reaction temperature, improved reaction efficiency and simple reaction process

Active Publication Date: 2018-01-05
欧中电子材料(重庆)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The process of using fluorine gas as a fluorinating agent is synthesized by passing fluorine gas through a fluidized bed or fixed bed of metal tungsten (granular or powder), but this process is also a gas-solid reaction, and the gas is only on the surface of tungsten. Reaction, limited contact area, low reaction efficiency, waste of unreacted raw material gas, etc.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Add 30kg of raw material 100 mesh tungsten powder into the reactor (dimensions ￠89×4.5×1000) already equipped with cobalt trifluoride (powder), and dehydrate and dry both equipment and pipelines (heating and vacuuming, water content ≤ 3ppm) , and then the reactor was heated to reaction temperature conditions. During the reaction, the fluorine gas is raised to 2bar through the compressor and then passed into the reactor through the adsorber for reaction. The reaction temperature is 300°C, and the inlet flow rate is set at about 120L / min; the tail gas discharged from the reactor enters through the filter The low-temperature collection tank condenses and collects WF6, and the collection temperature is -5°C; the function of the filter is mainly to remove solid substances such as dust and particles in the tail gas; the function of the adsorber is to absorb the HF impurities contained in the tail gas; WF6 gradually condenses into liquid at low temperature (lower than its boil...

Embodiment 2

[0030] Add 30kg of raw material 100 mesh tungsten powder into the reactor (dimensions ￠89×4.5×1000) that has been equipped with silver difluoride (powder), and carry out dehydration and drying operation with equipment and pipelines (heating and vacuuming, water content ≤ 3ppm ), and then the reactor was heated to the reaction temperature. During the reaction, the fluorine gas is raised to 1.5bar through the compressor and then passed through the adsorber into the reactor for reaction. The reaction temperature is 280°C, and the intake flow rate is set at about 120L / min; the tail gas discharged from the reactor passes through the filter Enter the low-temperature collection tank to condense and collect WF6, and the collection temperature is -5°C; the function of the filter is mainly to remove solid substances such as dust and particles in the tail gas; WF6 in the tail gas entering the low-temperature collection tank is gradually It is condensed into liquid, and the uncondensed ga...

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PUM

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Abstract

The method discloses a synthesis method of tungsten hexafluoride, comprising the following steps: putting tungsten powder and metal fluoride into a reactor, sufficiently mixing, introducing fluorine under a reaction condition, reacting to synthesize the tungsten hexafluoride, enabling the raw material fluorine which is not completely reacted and the product tungsten hexafluoride to be subjected tocondensation gas liquid separation, and then returning to the reactor for circular reaction. According to the synthesis method, the circulated fluorine and tungsten powder are used for reacting in the presence of the metal fluoride, the reaction efficiency is effectively improved, the waste of the raw material fluorine is reduced, and the needed size of the reactor is effectively reduced.

Description

technical field [0001] The invention relates to a new method for synthesizing tungsten hexafluoride. The method uses tungsten powder as a raw material, and reacts with fluorine gas under the action of a cobalt catalyst to synthesize tungsten hexafluoride. Background technique [0002] Tungsten hexafluoride, whose chemical formula is WF6, is a colorless gas. When condensed, it is a light yellow liquid with a molar mass of 297.83g / mol. It is one of the densest gases. Tungsten hexafluoride is mainly used for chemical vapor deposition of tungsten, and also for the preparation of low-resistance, high-melting-point interconnection lines and large-scale integrated circuit electronic components, protective covers against X-rays or γ-rays, and high-efficiency solar absorbers. [0003] Regarding the synthesis of tungsten hexafluoride, the most important synthesis route is still the process of using fluorine gas as the fluorinating agent, and a few manufacturers will use NF3 as the flu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01G41/04
CPCC01G41/04
Inventor 张建长雷海平
Owner 欧中电子材料(重庆)有限公司
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