Quartz crystal resonator and processing method thereof

Abstract

The invention belongs to the field of the electronic components, and specifically relates to a quartz crystal resonator and a processing method thereof. The quartz crystal resonator comprises a base,a wafer, a metal kovar ring and a metal cover plate, wherein the wafer is arranged in the base; the metal kovar is sintered at the gate of the base; the metal cover plate is held in an intra-ring region formed by the metal kovar ring and placed at the gate of the base; and the metal cover plate is fixedly connected with the metal kovar ring through laser slit bonding. The processing method disclosed by the invention comprises the following steps: S1, crystal sorting; S2, crystal cutting; S3, crystal grinding; S4, polishing, S5, chemical corrosion; S6, crystal silver-plating; and S7, encapsulating and forming, thereby obtaining the quartz crystal resonator. The quartz crystal resonator disclosed by the invention adopts a brand-new structure, the structure reduces the processing precision onthe metal cover plate and the metal kovar ring; the welding technology becomes simple and efficient, and the processing manufacturing cost of the resonator is obviously reduced.

Description

Technical field [0001] The invention belongs to the field of electronic components, and specifically relates to a quartz crystal resonator and a processing method thereof. Background technique [0002] The quartz crystal resonator is a piezoelectric device made of piezoelectric quartz (ie, crystal). It not only has highly stable physical and chemical properties, but also has extremely low elastic vibration loss. Compared with other electronic components, piezoelectric quartz crystal also has a high frequency stability and high Q value, making it an important component for frequency stabilization and frequency selection. [0003] In the prior art, the metal cover plate and the metal Kovar ring are welded and fixed by means of molten pool sealing, that is, the metal cover plate is pressed on the metal Kovar ring, and then the metal cover plate is melted through with a laser welding gun The welding connection between the metal cover plate and the metal Kovar ring is realized. This m...

AI Technical Summary

Problems solved by technology

This method of molten pool sealing and welding not only requires a higher power of the laser torch (because it needs to melt through the metal cover plate), but also requires the contact surface between the metal cover plate and the metal Kovar ring to be extremely smooth without gaps. When the flatness of the plate is defective, it will be difficult to achieve welding fixation, resulting in poor sealing performance

Due to the way of molten pool sealing and welding, the processing accuracy of the metal cover plate and the metal Kovar ring is also extremely high, which greatly increases the processing and manufacturing cost of the resonator

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