A method for preparing in-situ stretched samples for transmission electron microscopy

Abstract

The invention relates to a method of preparing an in-situ tensile sample of a transmission electron microscope. The method comprises the steps of preparing a block sample and feeding the block sampleto an FIB sample cabin, and focusing an ion beam onto the block sample; preparing an I-shaped rough blank with two thick ends and a thin middle crossbeam by using an ion beam; preparing a substrate, digging an I-shaped hole with two big ends and a thin middle crossbeam on the substrate, and cutting at two sides of the thin crossbeam of the I-shaped hole to form slopes, wherein the thin crossbeam is at the highest position of the slopes; connecting the rough blank with the substrate so as to form a sample; thinning the middle of the rough blank, and drilling a hole in the axis of the rough blank; and thinning the thin crossbeam of the rough blank in the thickness direction till the bottom end of the rough blank is damaged. The in-situ tensile sample of the transmission electron microscope comprises the substrate and the rough blank, wherein the rough blank is cut from a to-be-observed test sample, the substrate is made of a plastic material, and the rough blank is fixed in the substrate. Both plastic material and brittle material can be prepared into samples suitable for existing transmission electron microscope sample rods, and the yield of finished products is high.

Description

technical field [0001] The invention relates to a method for preparing a sample for in-situ tensile test under a transmission electron microscope. [0002] technical background [0003] Transmission electron microscope (referred to as transmission electron microscope) is a modern large-scale instrument and a powerful tool for studying the microstructure of substances. Technology is one of the most powerful research tools. At present, the resolving power of TEM has reached 0.1 nm, which is close to the atomic distance of solid matter. However, due to the limitation of the small sample chamber space of the transmission electron microscope, it is a challenge to realize the in situ revealing of the structural information at the atomic scale during the deformation process of the material while applying stress to the material in such a small sample chamber space. The conundrum facing researchers. [0004] At present, many commercial companies have developed several sample rods f...

AI Technical Summary

Problems solved by technology

Even so, its sample yield is very low, usually less than 30%

For some metal materials with poor processing performance (such as high-temperature alloys, die steels) and brittle materials such as amorphous alloys and ceramic semiconductors, they will crack when drilling, and it is impossible to prepare samples by conventional sample preparation methods.

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