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Metal mask plate and manufacturing method thereof

A metal mask and mask frame technology, which is applied in metal material coating process, semiconductor/solid-state device manufacturing, ion implantation and plating, etc. The number of times of use, low thermal expansion rate, and the effect of reducing production costs

Inactive Publication Date: 2018-02-09
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The material of the diaphragm (Sheet) is generally iron-nickel alloy or stainless steel (SUS). The mesh formation methods on the diaphragm (Sheet) include chemical etching, laser drilling, electroforming, etc. The current mass production method is chemical etching. , due to the large number of holes on the diaphragm (Sheet), the position and shape accuracy requirements are high, so the yield rate is very low, resulting in a very expensive price of a fine metal mask (FMM)

Method used

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  • Metal mask plate and manufacturing method thereof
  • Metal mask plate and manufacturing method thereof
  • Metal mask plate and manufacturing method thereof

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Embodiment Construction

[0031] The present invention will be further described below in conjunction with accompanying drawing.

[0032] see figure 1 , which is a schematic structural view of the metal mask of the present invention, wherein the metal mask of the present invention can be used for vapor deposition of an organic light-emitting display (OLED). Such as figure 1 As shown, the metal mask is a fine metal mask, which includes a mask frame 1, on which a diaphragm group with a mesh 3 is fixed, and a layer of magnetic film is arranged on the surface of the diaphragm group. Material coating 21.

[0033] In a specific embodiment of the present invention, the membrane set includes a plurality of membranes 2 with meshes 3 , wherein the plurality of membranes 2 are arranged on the mask frame 1 parallel to each other.

[0034] The mask frame 1 is a specially designed metal frame, which is used to fix the diaphragm 2. The diaphragm 2 is a metal diaphragm with a thickness of only tens of microns. The ...

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Abstract

The invention relates to a metal mask plate and a manufacturing method thereof. The metal mask plate comprises a mask frame; the mask frame is provided with a diaphragm set with meshes; and a magneticmaterial coating layer which is magnetized is arranged on the surface of the diaphragm set. The attracting force between a substrate and diaphragms is increased through the magnetic material coatinglayer on the diaphragm set; and under the same magnetic force condition, a magnetic plate of an evaporation machine enables a fine metal mask plate or an opening mask plate mold to tighter absorb withthe substrate, so that a gap between the diaphragm set and the substrate is reduced, the evaporation shadow is reduced, and the product yield is improved.

Description

technical field [0001] The invention relates to the technical field of organic light emitting display processing devices, in particular to a metal mask and a manufacturing method thereof. Background technique [0002] Active Matrix Organic Light Emitting Display (AMOLED), as an emerging display technology, is gradually being applied to electronic products, such as smart phones, smart watches, and TVs. In the active matrix organic light-emitting display (AMOLED) process technology, organic semiconductor material coating is one of the most critical processes. At present, the only mass-produced organic light-emitting diode (OLED) film-forming technology is vacuum evaporation and metal mask (Metal Mask) ) method, the organic semiconductor material is heated and evaporated in the evaporation source, and the organic small molecule or metal vapor passes through the opening of the mold (Mask), and then forms a film on the display area of ​​the glass substrate. [0003] The organic ...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24H01L51/56H01L27/32
CPCC23C14/042C23C14/24H10K59/12H10K71/00
Inventor 洪执华施展朱东日
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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