Metal mask plate and manufacturing method thereof
A metal mask and mask frame technology, which is applied in metal material coating process, semiconductor/solid-state device manufacturing, ion implantation and plating, etc. The number of times of use, low thermal expansion rate, and the effect of reducing production costs
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[0031] The present invention will be further described below in conjunction with the drawings.
[0032] See figure 1 , Which is a schematic diagram of the structure of the metal mask of the present invention, wherein the metal mask of the present invention can be used for vapor deposition of organic light emitting displays (OLED). Such as figure 1 As shown, the metal mask is a fine metal mask, which includes a mask frame 1, a diaphragm set with mesh 3 is fixed on the mask frame 1, and a magnetic layer is provided on the surface of the diaphragm set. Material coating 21.
[0033] In a specific embodiment of the present invention, the diaphragm set includes a plurality of diaphragms 2 with meshes 3, wherein the plurality of diaphragms 2 are arranged on the mask frame 1 in parallel with each other.
[0034] The mask frame 1 is a specially designed metal frame that is used to fix the diaphragm 2. The diaphragm 2 is a metal diaphragm with a thickness of only tens of microns. The diaphrag...
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