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Method for PVD film plating on surfaces of workpieces

A workpiece surface and workpiece technology, applied in the field of PVD coating on the workpiece surface, can solve the problems of product compactness and poor corrosion resistance, and achieve the effect of denser film structure and finer film

Active Publication Date: 2018-02-09
SUZHOU CHAMPION COATING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, there are certain defects in the coating formed by the single coating technology of the existing PVD technology, which also leads to the defects of poor compactness and corrosion resistance of the product.

Method used

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  • Method for PVD film plating on surfaces of workpieces
  • Method for PVD film plating on surfaces of workpieces
  • Method for PVD film plating on surfaces of workpieces

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] The workpiece to be plated in this embodiment is made of skd11 material.

[0030] In this example, if figure 1 Shown, where, the target current according to I=10+140∣sin(∏t 1 )∣regularly changing periodically; the corresponding magnetic field strength is according to B=1000-900∣sin(∏t 1 )∣regularly changing periodically, t 1 is the coating time, the change cycle of the current and the magnetic field is 1 second, the unit of the above-mentioned target current is A, and the unit of the magnetic field strength is Gs. in, figure 1 Among them, B represents the change cycle of the magnetic field intensity, and I represents the target electrorheological cycle.

[0031] Grind the selected workpiece to be coated with metallographic sandpaper or grinding wheel and then clean it. After cleaning with alkaline reagent, rinse it to neutral and dry it; then, wash and dry the workpiece to be coated Put the work into the coating chamber for fixing;

[0032] Then, vacuumize the coa...

Embodiment 2

[0037] The workpiece to be plated in this embodiment is made of skd11 material.

[0038] In this example, if figure 2 Shown, among them, target current I=150-140[t 2 -(k-1)], magnetic field strength B=100+900[t 2 -(k-1)],t 2 is the coating time, k is the number of repeated cycles, the change cycle of the current and the magnetic field is 1 second, the unit of the above-mentioned target current is A, and the unit of the magnetic field strength is Gs. in, figure 1 Among them, B represents the change cycle of the magnetic field intensity, and I represents the change cycle of the target current.

[0039] Grind the selected workpiece to be coated with metallographic sandpaper or grinding wheel and then clean it. After cleaning with alkaline reagent, rinse it to neutral and dry it; then, wash and dry the workpiece to be coated Put the work into the coating chamber for fixing;

[0040] Then, vacuumize the coating chamber to make the vacuum in the coating chamber higher than 2....

Embodiment 3

[0045] In this example, if figure 1 Shown, where, the target current according to I=10+140∣sin(∏t 1 )∣regularly changing periodically; the corresponding magnetic field strength is according to B=1000-900∣sin(∏t 1 )∣regularly changing periodically, t 1 is the coating time, the change cycle of the current and the magnetic field is 1 second, the unit of the above current is A, and the unit of the magnetic field strength is Gs.

[0046] Grind the selected workpiece to be coated with metallographic sandpaper or grinding wheel and then clean it. After cleaning with alkaline reagent, rinse it to neutral and dry it; then, wash and dry the workpiece to be coated Put the work into the coating chamber for fixing;

[0047] Then, vacuumize the coating chamber to make the vacuum in the coating chamber higher than 1.5x10 -3 pa, heated to 220°C; pass in argon (Ar), adjust the magnetic field to 600Gs, adjust the target current to 75A, turn on the power, and bombard the surface of the produ...

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Abstract

The invention relates to a method for PVD film plating on surfaces of workpieces, belongs to the technical field of surface treatment, and solves the defects of weak product compactness and corrosionresistance caused by a certain defects in coating layers formed by single film plating technologies in traditional PVC technologies. The method for PVD film plating on the surfaces of the workpieces comprises the following steps: (A) precleaned workpieces to be plated are put in a film plating chamber; and then, the film plating chamber is vacuumized and heated; (B) after heating, argon is introduced for ion bombardment on the workpieces to be plated; and (C) working gas is introduced; a power supply is turned on to apply bias voltage to the workpieces to be plated; a target source is turned on to start film plating; then, the target source is driven by periodical change of an electric field and a magnetic field to switch between magnetron sputtering and cathode arc modes for film plating;and plating layers with corresponding materials are deposited on the surfaces of the workpieces to be plated to obtain the surface-plated workpieces. The method for PVD film plating on the surfaces of the workpieces can realize better film layer compact structures and efficient corrosion resistance.

Description

technical field [0001] The invention relates to a method for PVD coating on the surface of a workpiece, belonging to the technical field of surface coating. Background technique [0002] PVD coating technology is used in many surface treatment and film material preparation, such as hard coating on mold surface, protective coating on the surface of various parts, surface modification coating, conductive and light-transmitting coating, etc. In the current PVD coating process, the biggest problem of the coating material is the problem of compactness, which causes the performance of the coating film material to be very different from that of the solid block material, so that the characteristics of the coating material cannot be fully displayed. The main reason for this problem is PVD technology and process. PVD technology mainly includes evaporation coating, sputtering coating and arc ion coating. However, these coating technologies have their own advantages and disadvantages, ...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/32
CPCC23C14/325C23C14/3492C23C14/35
Inventor 陈君乐务时
Owner SUZHOU CHAMPION COATING TECH
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