Preparation method of a multi-level nano-coating on the surface of magnesium alloy with adjustable corrosion resistance
A nano-coating and magnesium alloy technology, applied in the fields of corrosion resistance regulation, surface coating design and preparation of medical magnesium alloys, can solve the problems of poor biological fusion, body toxicity, difficulty in forming three-dimensionality or step coverage, etc. achieve good coverage
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Embodiment 1
[0024] The size of the magnesium alloy sample is 90mm×90mm×4mm, coated with single-stage titanium nitride (TiN 2 ) / Titanium Dioxide (TiO 2 ) nanocoating. The steps of dehydrogenation of magnesium alloy, preparation of PE-ALD working chamber, preparation of multi-level nano-coating, and reduction of PE-ALD working chamber are carried out in sequence. Single-stage titanium nitride (TiN 2 ) / Titanium Dioxide (TiO 2 ) In the preparation of nano-coatings, the TDEAT gas injection time was controlled to be 0.02s when the titanium nitride film was prepared, the film thickness increased by 0.05nm per cycle, and the number of cycles was 120; when the titanium dioxide film was prepared, the number of cycles was 160. Single-stage titanium nitride (TiN 2 ) / Titanium Dioxide (TiO 2 ) The number of nano-coating superimpositions N is 1, and the preparation of a single-stage nano-coating is completed.
[0025] The coating thickness was measured to be 14nm by atom probe characterization (AF...
Embodiment 2
[0027] Magnesium alloy sample size is 90mm×90mm×4mm, coated with double-stage titanium nitride (TiN 2 ) / Titanium Dioxide (TiO 2 ) nanocoating. The steps of dehydrogenation of magnesium alloy, preparation of PE-ALD working chamber, preparation of multi-level nano-coating, and reduction of PE-ALD working chamber are carried out in sequence. Single-stage titanium nitride (TiN 2 ) / Titanium Dioxide (TiO 2 ) In the preparation of nano-coatings, the TDEAT gas injection time was controlled to be 0.02s when the titanium nitride film was prepared, the film thickness increased by 0.05nm per cycle, and the number of cycles was 120; when the titanium dioxide film was prepared, the number of cycles was 160. Single-stage titanium nitride (TiN 2 ) / Titanium Dioxide (TiO 2 ) The number of nano-coating superimpositions N is 2, and the preparation of the two-stage nano-coating is completed.
[0028] Detected by atom probe characterization (AFM), the measured thickness of the coating is 28nm...
Embodiment 3
[0030] The size of the magnesium alloy sample is 90mm×90mm×4mm, coated with single-stage titanium nitride (TiN 0.5 ) / Titanium Dioxide (TiO 2 ) nanocoating. The steps of dehydrogenation of magnesium alloy, preparation of PE-ALD working chamber, preparation of multi-level nano-coating, and reduction of PE-ALD working chamber are carried out in sequence. Single-stage titanium nitride (TiN 0.5 ) / Titanium Dioxide (TiO 2 ) nano-coating preparation, the TDEAT gas injection time was controlled to be 1 s when the titanium nitride film was prepared, the film thickness increased by 0.08 nm per cycle, and the number of cycles was 100; when the titanium dioxide film was prepared, the number of cycles was 200. Single-stage titanium nitride (TiN 0.5 ) / Titanium Dioxide (TiO 2 ) The number of nano-coating superimpositions N is 1, and the preparation of a single-stage nano-coating is completed.
[0031] Detected by atom probe characterization (AFM), the measured coating thickness is 18nm;...
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