Magnetic suspension electrode dielectric barrier diffuse discharge plasma generation device

Abstract

The invention provides a magnetic suspension electrode dielectric barrier diffuse discharge plasma generation device comprising a PTFE support. The center of the bottom part of the PTFE support is provided with a magnetic grounding electrode, micropore ceramic and a magnetic suspension electrode which are arranged from the bottom to the top in turn. The center of the top part of the PTFE support is provided with a high voltage electrode and an alumina ceramic barrier dielectric which are arranged from the top to the bottom in turn, wherein a gap is reserved between the magnetic suspension electrode and the alumina ceramic barrier dielectric. The device generates negative diffuse discharge from multiple points to the surface under driving of an AC power supply in working, and the high voltage side becomes a transient cathode so that a large number of active particles can be accumulated. Magnetic iron powder is arranged on the surface of the barrier dielectric, and a large number of triple junction points are manufactured on the surface of the barrier dielectric so as to acquire the diffuse discharge plasmas; and the iron powder can be melted to take away the heat in case of discharge overheat so as to protect the barrier dielectric material. The device can be used as the plasma generation device for the aspect of material surface modification of films and insulators, etc.

Description

technical field [0001] The invention belongs to the technical field of gas discharge, and in particular relates to a dielectric barrier diffuse discharge plasma generator of a magnetic suspension electrode. Background technique [0002] Non-equilibrium discharge plasma contains a large number of highly chemically active particles, which are widely used in many fields such as ozone preparation, material surface deposition and material surface modification, and have broad application prospects in the fields of biomedicine, aerospace propulsion and environmental protection. In the application of non-equilibrium discharge plasma, it is very important to develop a stable and adaptable non-equilibrium plasma source, which is in the basic position in the technical field of non-equilibrium discharge plasma. [0003] In the field of plasma material surface deposition and modification, traditional non-equilibrium discharge plasma sources usually rely on a low-pressure maintenance syst...

AI Technical Summary

Problems solved by technology

However, so far, researchers have only been able to obtain stable large-area uniform or diffuse discharges in a small amount of noble gases and their mixtures.

In gases with high breakdown field strength such as air, it often appears as streamer-type discharge filaments with concentrated energy, which is unevenly treated and easily burns the processed material, which greatly limits the performance of atmospheric pressure non-equilibrium discharge plasma. application

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