Diffusion adjustable type tail gas device of solar cell

Abstract

The invention discloses a diffusion adjustable type tail gas device of a solar cell. The device comprises a tail gas pipe, a connecting valve, a condensing bottle, a filtering bottle, an acid discharging pipeline and a PVDF (polyvinylidene fluoride) ball valve. The left end of the tail gas pipe is connected with a diffusion furnace, and the right end of the tail gas pipe is connected with the leftend of the condensing bottle. The right end of the condensing bottle is connected with the left end of the filtering bottle through the tail gas pipe. The upper end of the filtering bottle is fixedlyconnected with the left end of the acid discharging pipeline through a connecting hose. Connecting valves are arranged on the tail gas pipe and are positioned on the left side and the right side of the condensing bottle. The PVDF (polyvinylidene fluoride) ball valve is arranged between the connecting hose and the acid discharging pipeline. The diffusion adjustable type tail gas device of the solar cell is convenient to adjust and control. There working risk due to abnormal diffusion can be reduced. The reworking proportion is reduced. The acid emission amount is degraded, and the diffusion process is optimized. The cost is saved.

Description

Technical field [0001] The invention belongs to the technical field of solar cells, and specifically relates to a solar cell diffusion adjustable exhaust device. Background technique [0002] At present, the polycrystalline silicon solar cell technology has become increasingly mature, and standardized production is realized. The main process steps are as follows: acid etching texturing → diffusion bonding → wet etching and trimming → PECVD anti-reflection coating → screen printing → sintering → test sorting . Among them, diffusion is the most important step. In order to reduce the thickness of the "dead layer" during the diffusion process, and with the innovation of the silver paste, the diffusion gradually adopts the low surface concentration shallow junction process, and the phosphorus oxychloride is introduced during the diffusion. The flow rate is significantly reduced, and the exhaust acid exhaust has a greater impact on the average square resistance and uniformity of the d...

AI Technical Summary

Problems solved by technology

Among them, diffusion is the core step. In order to reduce the thickness of the "dead layer" in the diffusion process, and with the innovation of silver paste, the diffusion gradually adopts the low surface concentration shallow junction process, and the phosphorus oxychloride introduced during the diffusion The flow rate is significantly reduced, and the exhaust gas acid exhaust has a greater impact on the average and uniformity of the diffusion square resistance, resulting in a significant difference in the average square resistance between the diffusion furnace tubes, and a large fluctuation in the unevenness of the square resistance within and between the plates

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