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Preparation method of CrSiBCN nanocomposite film

A nano-composite and thin-film technology, which is applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems that CrN thin film is not suitable for application, and achieve the effect of improving hardness and reducing dry friction coefficient

Active Publication Date: 2018-05-04
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

However, after a lot of research, it has been found that CrN films deposited by different preparation methods have medium hardness (10 GPa) and high friction coefficient (about 0.5) under dry friction conditions, which makes CrN films unsuitable for application in the wear rate of surface materials. and special working conditions with strict friction coefficient

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  • Preparation method of CrSiBCN nanocomposite film
  • Preparation method of CrSiBCN nanocomposite film
  • Preparation method of CrSiBCN nanocomposite film

Examples

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Embodiment 1

[0021] (1) Substrate cleaning: 316L stainless steel (Φ30×6 mm) with roughness polished to 50 nm 2 ) in acetone, alcohol and deionized water for 10 minutes each, blown dry with a hair dryer and clamped on the stage of the physical vapor deposition system, 17 cm away from the target; when the physical vapor deposition system background vacuum degrees up to 3.0 x 10 -6 At Torr, 50 sccm of Ar gas is introduced, the bias voltage of the stainless steel substrate is set to -450V, and the Ar gas generated by the ion beam source is used to + Ion acceleration bombards the surface of 316L stainless steel for 30 minutes to remove pollutants on the surface of the substrate and activate the deposition surface;

[0022] (2) Preparation of transition layer: Ar + After the substrate was cleaned by ion bombardment, the Ar gas flow rate was kept at 50 sccm, the bias voltage of the stainless steel substrate was adjusted to -80V, and the metal Cr target was loaded with a power of 1200 W through...

Embodiment 2

[0025] (1) Substrate cleaning: 316L stainless steel (Φ30×6 mm) with roughness polished to 50 nm 2 ) in acetone, alcohol and deionized water for 10 minutes each, blown dry with a hair dryer and clamped on the stage of the physical vapor deposition system, 17 cm away from the target; when the physical vapor deposition system background vacuum degrees up to 3.0 x 10 -6 At Torr, 50 sccm of Ar gas is introduced, the bias voltage of the stainless steel substrate is set to -450V, and the Ar gas generated by the ion beam source is used to + Ion acceleration bombards the surface of 316L stainless steel for 30 minutes to remove pollutants on the surface of the substrate and activate the deposition surface;

[0026] (2) Preparation of transition layer: Ar + After the substrate was cleaned by ion bombardment, the Ar gas flow rate was kept at 50 sccm, the bias voltage of the stainless steel substrate was adjusted to -80V, and the metal Cr target was loaded with a power of 1200 W through...

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Abstract

The invention provides a preparation method of a CrSiBCN nanocomposite film, belongs to the field of film tribology and surface engineering, and can improve the hardness of a CrN film and reduce the dry friction coefficient of the CrN film. The preparation method comprises three steps of cleaning of a stainless steel substrate, preparation of a transition layer and preparation of a nanocomposite film; and a unbalance magnetron sputtering technology is used for co-sputtering of direct-current (DC) and radio-frequency (RF) magnetron targets in Ar, N2 or mixed atmosphere containing Si and C element gas to prepare the CrSiBCN nanocomposite film on the stainless steel substrate. In the preparation method of the CrSiBCN nanocomposite film, the Si and C elements can be from the reaction atmosphere or the sputtered targets; and the preparation method is high in operability, and is suitable for unbalance magnetron sputtering systems with different target positions and gas way configuration numbers.

Description

technical field [0001] The invention belongs to the field of film tribology and surface engineering, and in particular relates to a preparation method of a CrSiBCN nanocomposite film. Background technique [0002] Chromium nitride (CrN), as the first representative surface protective coating, has a place in both surface wear-resistant and anti-corrosion applications because of its good mechanical properties and chemical inertness. However, after a lot of research, it has been found that CrN films deposited by different preparation methods have medium hardness (10 GPa) and high friction coefficient (about 0.5) under dry friction conditions, which makes CrN films unsuitable for application in the wear rate of surface materials. And in special working conditions with strict friction coefficient requirements. In order to improve the hardness of CrN thin film and reduce its dry friction coefficient, the CrN nanocomposite structure was constructed and lubricating components were ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35C23C14/02
CPCC23C14/0057C23C14/025C23C14/0664C23C14/352
Inventor 王谦之周飞孔继周
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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