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New low-pass filter using solenoid type silicon-through-hole inductor

A low-pass filter and through-silicon via technology, which is applied in the field of passive electronic devices, can solve the problems of filter occupied area and packaging cost that cannot meet requirements, and achieves improved performance, short interconnect length, and reduced physical size. Effect

Inactive Publication Date: 2018-05-04
HANGZHOU DIANZI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

With the continuous shrinking of integrated devices, traditional filters can no longer meet the demand in terms of occupied area and packaging cost

Method used

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  • New low-pass filter using solenoid type silicon-through-hole inductor
  • New low-pass filter using solenoid type silicon-through-hole inductor
  • New low-pass filter using solenoid type silicon-through-hole inductor

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with accompanying drawing.

[0029] The low-pass filter of the present invention is composed of multiple element units, and the input and output ports are located in the re-layout layer on the top of the substrate.

[0030] The element unit includes a solenoid-type TSV inductor 600, first and second coaxial TSV capacitors 700, 800, and first to third connecting substrates 900-1100. The solenoidal TSV inductor 600 includes a substrate top reconfiguration layer 300 , two columns of TSV arrays 400 and a substrate bottom reconfiguration layer 500 .

[0031] The top re-layout layer of the solenoidal TSV inductor substrate includes first to fourth substrates 301-304, which are in the same plane and not connected to each other; the second substrate 302 and the third substrate 303 are parallel to each other. The reconstruction layer 500 at the bottom of the base includes first to third substrates 501-503, and...

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Abstract

The invention discloses a new low-pass filter using a solenoid type silicon-through-hole inductor. A signal is input through an input port, one part of current flows into a coaxial silicon through hole and enters a current return path, and the other part of current flows into an annular silicon-through-hole array, then flows into the current return path and finally flows out from an output port. Alow-pass filter element composed of a coaxial silicon through hole capacitor and the solenoid type silicon-through-hole inductor is made use of, and the physical dimension of the element is reduced.The coaxial silicon through hole is used as the capacitor, compared with a traditional two-dimensional capacitor, capacitor has very short interconnection length, and thus the delaying time and conductor loss are reduced. Moreover, the use of the solenoid type silicon-through-hole inductor greatly reduces the physical dimension of a resonator, and various kinds of performance of the low-pass filter are greatly improved.

Description

technical field [0001] The invention belongs to the technical field of passive electronic devices, and relates to a microwave filter element, in particular to a passive low-pass filter structure using through-silicon holes. Background technique [0002] With the rapid development of modern communication technology, the special requirements for the use of communication equipment make people have higher and higher requirements for the weight and size of communication equipment, especially the miniaturization, portability and low power consumption of filters in mobile communication systems requirements are getting stronger. With the continuous shrinking of integrated devices, traditional filters can no longer meet the demand in terms of occupied area and packaging cost. [0003] In recent years, with the rapid development of three-dimensional integrated circuits, a new integrated circuit manufacturing process, through-silicon via technology, has received extensive attention. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/538H01L27/06H01L23/64H03H1/00
CPCH01L23/5384H01L27/0688H01L28/10H01L28/40H03H1/00H03H2001/005H03H2001/0064
Inventor 王高峰苏开心泮金炜赵文生
Owner HANGZHOU DIANZI UNIV
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