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Three-dimensional deformation measuring method based on synthesis wavelength double-light-source shearing speckle interferometry

A technology of three-dimensional deformation and synthesis of wavelengths, which is applied in the field of optical imaging, can solve the problems of poor anti-interference and low precision, and achieve the effects of high precision, large measurement range and reduced spectrum aliasing

Inactive Publication Date: 2018-05-08
QIQIHAR UNIVERSITY
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Problems solved by technology

[0006] The purpose of the present invention is to solve the problems of low precision and poor anti-interference in three-dimensional deformation measurement, and provide a three-dimensional deformation measurement method based on synthetic wavelength dual light source shearing speckle interference

Method used

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  • Three-dimensional deformation measuring method based on synthesis wavelength double-light-source shearing speckle interferometry
  • Three-dimensional deformation measuring method based on synthesis wavelength double-light-source shearing speckle interferometry
  • Three-dimensional deformation measuring method based on synthesis wavelength double-light-source shearing speckle interferometry

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specific Embodiment approach 1

[0046] Specific implementation mode one: as figure 1 As shown, what is described in this embodiment is a three-dimensional deformation measurement method based on synthetic wavelength dual-light source shearing speckle interference, and the steps of the method are as follows:

[0047] Step 1: Two beams of red laser and green laser with different wavelengths pass through the optical beam splitter, and are irradiated by the reflector and beam expander and placed on the measured object in the vacuum box, reflected on the surface of the measured object, and the reflected light passes through The convex lens L1 performs light interference through the shearing mirror in the shearing interference device, and collects the interference image in the CCD camera;

[0048] Step 2: Control the PZT phase shift through the PZT controller (piezoelectric ceramic controller). The red laser passes through the R channel of the color camera, and the green laser passes through the G channel of the c...

Embodiment 1

[0085] Assume that in the selected measurement system, the diode-pumped laser emits green light with a wavelength of λ g =532nm, the helium-neon laser emits red light with a wavelength of λ r =632.8nm, due to the good coherence of the laser, after the two laser beams are coherent, the energy of the center spot of the beam is enhanced, and a high-power coherent beam can be obtained, which makes the wavelength longer and the measurement range larger, which helps to reduce the degree of spectrum aliasing , whose synthetic equivalent wavelength is λ s :

[0086]

[0087] The synthetic wavelength can be obtained by calculation, that is, λ s = 3.3398 μm.

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Abstract

The invention provides a three-dimensional deformation measuring method based on synthesis wavelength double-light-source shearing speckle interferometry, and belongs to the technical field of opticalimaging. The method includes: red laser and green laser respectively pass through a light beam splitter and are irradiated to a measured object through a reflecting mirror and a light beam expander,reflection occurs on the surface of the measured object, the reflected light passes through a convex lens and performs light interference through a shearing mirror, and an interference image is acquired in a CCD camera; a PZT phase shift amount is controlled through a piezoelectric ceramic controller, and the red laser and the green laser are respectively and simultaneously recorded through the CCD camera through an R channel and a G channel of a color camera; the pressure in a vacuum box is adjusted through a pressure adjusting valve, and a pressure value is displayed through a pressure meter; Fourier transform is performed on the interference image, and the relation between the synthesis wavelength phase fringe number and the single wavelength fringe number is calculated; and an in-planedisplacement derivative matrix and an out-of-plane displacement derivative matrix are calculated, and a three-dimensional deformation matrix of the object is obtained according to optical geometric characteristics of a measuring system to realize three-dimensional deformation measurement of the object.

Description

technical field [0001] The invention belongs to the technical field of optical imaging, and in particular relates to a three-dimensional deformation measurement method based on shearing speckle interference of double light sources with synthetic wavelengths. Background technique [0002] As the main measurement methods, digital speckle interferometry and hybrid photometry have achieved certain research results in 3D deformation measurement, but there are still some problems in the following aspects: [0003] (1) The measurement optical path is complex and inconvenient to operate, the measurement range is small, and the requirements for the environment and hardware equipment are high, which cannot meet the engineering environment measurement. [0004] (2) When measuring the depth deformation caused by defects, the speckle interference fringe pattern collected on the CCD is too dense, and undersampling occurs. Commonly used digital image processing methods fail, and the real p...

Claims

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Application Information

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IPC IPC(8): G01B11/16
Inventor 魏连锁郭媛胡现成
Owner QIQIHAR UNIVERSITY
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