A method and system for reconstructing three-dimensional microstructure of materials
A microstructure and reconstruction system technology, applied in the analysis of materials, material analysis using wave/particle radiation, image enhancement, etc., can solve the problem of inaccurate division of components, achieve wide division and avoid secondary etching Effect
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Embodiment 1
[0044] figure 1 It is a flowchart of a material three-dimensional microstructure reconstruction method in this embodiment, such as figure 1 As shown, a method for reconstructing the three-dimensional microstructure of a material in this embodiment includes:
[0045] S1. Etching the material to be tested to obtain the cross section of the material;
[0046] In this step, a focused ion beam device is used to etch the material to be tested to obtain a cross section of the material; the focused ion beam is an ion beam generated by a Ga ion source, and the focused ion beam is accelerated by an ion gun to etch the material; the focused ion beam The accelerating voltage is adjusted according to different material properties.
[0047] In this embodiment, the accelerating voltage intensity of the focused ion beam emitting gun can be set to 20kV, and the generated accelerated ion beam can be used to perform cross-sectional etching on the material to be tested, and the cross-sectional ...
Embodiment 2
[0072] In this embodiment, before the reconstruction of the three-dimensional microstructure of the material, it also includes: a material preparation process, specifically:
[0073] A certain amount of lithium-ion battery cathode active material (lithium cobalt oxide), conductive agent (carbon black), and binder (PVDF) are fully dry-ground according to a certain ratio, and a certain amount of NMP (N-methylpyrrolidone) is added to carry out wet grinding;
[0074] The ground slurry is scraped on the aluminum foil to form a porous material coating with a thickness of about 100 microns;
[0075] Cut the material into a size of 3mm×3mm, and conduct gold evaporation;
[0076] The gold-plated sample is placed on the sample stage, and the detection area is determined by the scanning electron microscope device.
[0077] In this embodiment, by using the three-dimensional microstructure reconstruction method, using the distribution of elemental components as the standard for the divis...
Embodiment 3
[0079] figure 2 It is a structural diagram of a material three-dimensional microstructure reconstruction system in this embodiment, such as figure 2 As shown, a material three-dimensional microstructure reconstruction system in this embodiment includes:
[0080] The focused ion beam device 10 is used to etch the material to be tested to obtain a cross section of the material;
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