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CIGS thin film pretreatment system and method

A pretreatment and thin film technology, applied in gaseous chemical plating, coating, photovoltaic power generation, etc., can solve problems such as unevenness and uneven film surface

Inactive Publication Date: 2018-06-08
BEIJING APOLLO DING RONG SOLAR TECH
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Problems solved by technology

[0003] The invention provides a system and method for CIGS thin film pretreatment, which solves the problem of uneven and uneven surface of the film in the process of preparing the existing CIGS thin film using plasma, and can obtain a smoother thin film surface and improve the efficiency of CIGS thin film solar cells. absorption rate and stability

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  • CIGS thin film pretreatment system and method
  • CIGS thin film pretreatment system and method

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Embodiment Construction

[0041] In order to enable those skilled in the art to better understand the solutions of the embodiments of the present invention, the embodiments of the present invention will be further described in detail below in conjunction with the drawings and implementations.

[0042] In view of the problem that the surface of the CIGS thin film of the current solar cell is prepared by plasma, the surface of the thin film is uneven and there is an unevenness problem. The present invention provides a system and method for pretreatment of the CIGS thin film. Form a radio frequency voltage, make the radiation generated by the inductance coil make the process gas form plasma in the process chamber, and make the plasma bombard the unevenness of the CIGS film, so that a smoother film surface can be obtained, and the absorption rate and stability of CIGS thin film solar cells can be improved. sex.

[0043] Such as figure 1 As shown, a CIGS film pretreatment system includes: a radio frequency...

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Abstract

The invention provides a CIGS thin film pretreatment system. The system comprises a radio frequency power supply, an inductive coil, a process cavity, an adaptive module, a negative electrode plate and a quartz cover; the inductive coil is wound around the top of the process cavity; the negative electrode plate is arranged at the bottom of the process cavity, and a substrate is arranged between the inductive coil and the negative electrode plate; the radio-frequency power supply comprises a first power source and a second power source; the first power source supplies power for the inductive coil through the adaptive module; and the second power source supplies power for the negative electrode plate through the adaptive module. Under the effect of a radio frequency voltage, rays formed by the inductive coil penetrates through the quartz cover to enter the process cavity to enable the process gas in the process cavity to form plasma; and the plasma moves towards the negative electrode plate under the effect of the voltage to bombard the concave-convex positions of the CIGS thin film on the substrate to enable the CIGS thin film to be leveled. By virtue of the CIGS thin film pretreatment system, the absorptivity and stability of a solar battery can be improved.

Description

technical field [0001] The invention relates to the technical field of solar battery thin films, in particular to a CIGS thin film pretreatment system and method. Background technique [0002] Among the existing solar cell technologies, copper indium gallium selenide (CIGS for short) thin-film solar cells have strong light absorption ability, good stability, good radiation resistance, high efficiency, and low cost, and can be made into flexible components. For photovoltaic cell production. Plasma deposition is mainly used in the preparation of CIGS thin films, but plasma is a collection of free charged particles that move randomly. The simplest way to form it is to drive the two plates through a radio frequency voltage source, so that the low-pressure gas between the plates produces a discharge phenomenon. When the current flows from one plate to the other, the gas is "broken down" to generate plasma . Plasma discharge can produce chemically active substances that deposit...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/365H01L31/032H01L31/18
CPCH01L21/02568H01L21/0262H01L21/02658H01L21/67011H01L31/0322H01L31/18C23C16/305C23C16/505C23C16/56H01J37/321H01J37/32174H01J37/32357H01J37/32577Y02E10/541Y02E10/544H01L31/1844
Inventor 徐义
Owner BEIJING APOLLO DING RONG SOLAR TECH