A Mechanical Photoelectric Switch Based on Quantum Tunneling Effect
A technology of quantum tunneling and photoelectric switches, applied in the field of weakly coupled mechanical photoelectric switches, to achieve the effects of light weight, high integration and high sensitivity
Active Publication Date: 2021-12-24
NANJING UNIV OF POSTS & TELECOMM
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Problems solved by technology
[0002] Traditional photoelectric switches are mostly based on the light absorption / light radiation mechanism in semiconductors, and the semiconductor materials used can only detect photons of specific wavelengths
In addition, it is difficult to achieve high integration of this type of switch with some specific micro / nanomechanical components without using peripheral circuits
Method used
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[0015] In order to deepen the understanding of the present invention, the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments, which are only used to explain the present invention and do not limit the protection scope of the present invention.
[0016] Such as figure 1 As shown, through the optical fiber, the laser light can be irradiated on the micromirror at the top of the passive cantilever beam. Due to the existence of light pressure, the dynamic characteristics (such as displacement) of the passive beam will change, and then affect the active cantilever beam through the mechanical coupling part. mechanical properties. Due to the extremely close distance between the metal electrode at the end of the active arm and S and D, electrons can have a quantum tunneling effect between the electrode and the metal module, so the slight impact of the passive arm on the active arm can be detected, resulting in a gap ...
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The present invention relates to the technical field of micro / nano-mechanical electronic systems (MEMS / NEMS), specifically, it is a weakly coupled mechanical photoelectric switch based on quantum tunneling effect. The photoelectric switch is composed of two mechanically coupled cantilever beams. They are the active cantilever beam and the passive cantilever beam respectively, and the two beams are coupled through mechanical components; when there is light pressure, the dynamic characteristics of the passive beam change and are fed back to the active beam through the mechanical coupling components; due to the quantum tunneling effect, the active beam It is extremely sensitive to the displacement change caused by feedback; when the mechanical coupling coefficient is constant, the active beam has two states of continuous oscillation and suspended oscillation under different light intensities. The continuous oscillation is regarded as the switch is closed, and the oscillation is regarded as the switch is closed. ; Finally, by adjusting the coupling coefficient of the mechanical coupling part, the switch can be turned on and off under different light intensities.
Description
technical field [0001] The invention relates to the technical field of micro / nano mechanical electronic systems (MEMS / NEMS), in particular to a weakly coupled mechanical photoelectric switch based on quantum tunneling effect. Background technique [0002] Traditional photoelectric switches are mostly based on the light absorption / light radiation mechanism in semiconductors, and the semiconductor materials used can only detect photons of specific wavelengths. In addition, it is difficult to achieve high integration of this type of switch with some specific micro / nano mechanical components without using peripheral circuits. In micro / nano mechanical electronic systems (MEMS / NEMS), it is often necessary to integrate opto-mechanical-electronics to achieve multi-physics sensing, actuation and energy conversion. Therefore, it is particularly important to invent a photoelectric switch compatible with micro / nano mechatronic systems. Aiming at this problem, the present invention pro...
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IPC IPC(8): H03K17/78H03K17/94
CPCH03K17/78H03K17/941
Inventor 徐庆昊周琦巩旭鹏靳雷生
Owner NANJING UNIV OF POSTS & TELECOMM