The invention discloses a Michelson interference micro-displacement measurement method and device based on
modal decomposition and phase regression, and belongs to the technical field of nanoscale displacement measurement. The device is composed of an optical
system and an electronic
system, wherein the optical
system is used for generating an interference
light field carrying displacement information, and the electronic system is responsible for collecting, preprocessing and digitizing interference signals. According to the method, self-adaptive
decomposition is carried out on interference signals through a band-limited
dynamic noise addition CEEMDAN
algorithm,
noise is effectively separated, phase trend information is extracted, high-precision
phase reconstruction is achieved in combination with prior linear least square regression, and finally the nanoscale displacement is obtained through calculation. According to the invention, excellent
measurement precision and robustness can still be maintained under complex conditions of incomplete
signal period, undersampling, low
signal-to-
noise ratio and the like, and the system is simple in structure and easy to implement, and can be widely applied to the fields of precision
processing, optical detection, micro-nano sensing,
semiconductor manufacturing and the like.