Method for preparing polycrystalline silicon ingot
A polysilicon and ingot casting technology, which is applied in the field of polysilicon ingot preparation, can solve the problems of poor minority carrier distribution uniformity and polycrystalline minority carrier lifetime reduction, and achieve the effects of improving overall distribution uniformity, crystal quality, and conversion efficiency.
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Embodiment 1
[0031] To resolve this technical issue, please refer to the figure 1 , the present invention proposes a kind of preparation method of polysilicon ingot, described method comprises the steps:
[0032] S101. After adding silicon raw material into the ingot casting furnace, continue vacuuming for a first preset time until the air pressure in the furnace reaches the first preset air pressure.
[0033] Vacuuming operation: Specifically, the silicon raw material introduced is pure silicon. The first preset time for vacuuming is 0.5-1 hour, and the air pressure in the ingot casting furnace should be controlled within the first preset air pressure after vacuuming. Wherein the first preset air pressure is less than 0.1 mbar, and the air pressure is close to a vacuum state. It should also be pointed out here that, during vacuuming, the ingot casting furnace is not heated, and the temperature in the ingot casting furnace needs to be controlled below 300°C.
[0034] S102. Continue heat...
Embodiment 2
[0048] The second embodiment of the present invention proposes a method for preparing a polysilicon ingot, the preparation method comprising the following steps:
[0049] (1) Vacuuming operation: After adding silicon raw materials into the ingot furnace, continue vacuuming for 0.5h until the air pressure in the furnace is less than 0.1mbar.
[0050] It should also be pointed out here that, during vacuuming, the ingot casting furnace is not heated, and the temperature in the ingot casting furnace needs to be controlled below 300°C.
[0051] (2) Heating operation: maintain the vacuum state in the ingot casting furnace, and continue heating the ingot casting furnace for 4 hours until the temperature in the ingot casting furnace is 1100°C.
[0052] (3) Melting operation: raise the temperature in the ingot casting furnace to 1400° C., and introduce argon gas so that the air pressure in the ingot casting furnace rises to 400 mbar, and carry out the melting operation for 12 hours.
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no. 3 example
[0060] The third embodiment of the present invention proposes a method for preparing a polysilicon ingot, the preparation method comprising the following steps:
[0061] (1) Vacuuming operation: After adding silicon raw materials into the ingot furnace, continue vacuuming for 1 hour until the air pressure in the furnace is less than 0.1mbar.
[0062] It should also be pointed out here that, during vacuuming, the ingot casting furnace is not heated, and the temperature in the ingot casting furnace needs to be controlled below 300°C.
[0063] (2) Heating operation: maintain the vacuum state in the ingot casting furnace, and continue heating the ingot casting furnace for 8 hours until the temperature in the ingot casting furnace is 1300°C.
[0064] (3) Melting operation: raise the temperature in the ingot casting furnace to 1600° C., and introduce argon gas so that the air pressure in the ingot casting furnace rises to 600 mbar, and carry out the melting operation for 18 hours. ...
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