Flexible Resistive Strain Sensors

Abstract

The invention relates to a flexible resistance type strain sensor comprising an insulating flexible substrate and a metal glass film. The metal glass film as a strain sensitive material is deposited on the flexible substrate. According to the flexible resistance type strain sensor, because of the metal glass film as the strain sensitive material, the flexible resistance type strain sensor has advantages of high sensitivity, large measuring strain range, small resistance temperature coefficient, and simple preparation method and the like; and thus the sensor can be used as a basic unit of the electronic skin and can be applied to fields of the stress-strain analysis and the like widely.

Description

technical field

[0001] The invention relates to a strain sensor, in particular to a flexible resistive strain sensor which uses a metal glass film as a strain sensing material. Background technique

[0002] Since the 1970s, the concept of electronic skin has appeared in many science fiction works. At the same time, scientists have also begun to continuously explore electronic skin, because electronic skin plays a huge role in the fields of intelligent robots and medical repair. Prospects [Document 1: B.C-K.Teel, C.Wang, R.Allen and Z.N.Bao, Nat.Nanotechnol.2012, Vol.7, 825.].

[0003] The basic unit of electronic skin is the flexible strain sensor. In existing research and development, scientists regard graphene, carbon nanotubes, metal or semiconductor nanowires, metal nanoparticles, organic polymers, etc. as candidate materials for future electronic skin. However, it has been known that these materials have more or less disadvantages, which strongly limit the practical a...

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