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Aerogel pressure sensor

A pressure sensor and aerogel technology, applied in the field of sensors, can solve the problems of weak small pressure detection ability, low detection limit, difficult to meet the pressure detection field, etc.

Active Publication Date: 2018-07-27
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sensitive materials used in these pressure sensors, such as steel and silicon, have high Young's modulus and low sensitivity coefficient, which leads to the weak detection ability of these types of sensors for small pressure, that is, the lower detection limit is higher, up to several kPa
Compared with the traditional pressure sensor, the new type of pressure sensor developed in recent years that uses conductive rubber mixed with carbon or metal particles with a small Young's modulus as the sensitive material has a lower detection limit, about 100Pa, and about 10Pa. Corresponding to a light touch on the human sense of touch, this type of sensor cannot be compared with the lower limit of human natural skin tactile detection
At the same time, the traditional pressure sensor has a single structure; an adhesive such as silver glue is needed to fix the electrode and the sensitive material to reduce the influence of the interface contact resistance, so the electrode cannot move, and the pressure in any direction cannot be measured; it is difficult to meet the requirements of pressure detection. The rapid development of demand in the field

Method used

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Experimental program
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Effect test

specific Embodiment 1

[0181] Such as figure 1 As shown, the copper electrodes 3a-c are arranged on the cubic elastic conductive graphene composite carbon nanotube airgel 1, the airgel can also be other elastic conductive aerogels, and the copper electrodes can be electrodes of other materials, as shown in the schematic diagram The electrode is in the form of a flat plate, and the shape is not limited. It can detect pressure in any direction in three-dimensional space. The pressure can be applied in a direct contact with the pressure sensor, or in a non-contact manner through medium conduction.

[0182] The obtained tactile sensor is for small pressure with a lower detection limit of 15Pa or less; it can also be a tactile sensor for medium pressure with a working range of 15Pa-200Pa; it can also be a pressure sensor for medium pressure with a working range of 200Pa-10kPa. It can also be a pressure sensor for high pressure with a working range of more than 10kPa; it can also be a pressure sensor fo...

specific Embodiment 2

[0183] Such as figure 2As shown, a free electrode 3 that can move in any direction is arranged on the spherical elastic conductive graphene composite carbon nanotube airgel 1, which can detect the pressure in any direction in three-dimensional space. The airgel can also be used for other elastic conductive airgel Glue and copper electrodes can be electrodes of other materials. In the schematic diagram, the electrodes are in the shape of probes, and the shape is not limited. As shown in the schematic diagram, the pressure can be applied in a direct contact with the pressure sensor, or in a non-contact manner through medium conduction.

[0184] The obtained tactile sensor is for small pressure with a lower detection limit of 15Pa or less; it can also be a tactile sensor for medium pressure with a working range of 15Pa-200Pa; it can also be a pressure sensor for medium pressure with a working range of 200Pa-10kPa. It can also be a pressure sensor for high pressure with a workin...

specific Embodiment 3

[0185] Such as image 3 As shown, two free electrodes 3a and b that can move in any direction are arranged on the surface of the spherical elastic conductive graphene composite carbon nanotube airgel 1, and the airgel can also be other elastic conductive aerogels, copper electrodes Electrodes of other materials can be used. In the schematic diagram, the electrodes are in the shape of probes, and the shape is not limited. It can detect pressure in any direction in three-dimensional space. The pressure can be applied in a direct contact with the pressure sensor, or in a non-contact manner through medium conduction.

[0186] The obtained tactile sensor for medium pressure has a working range greater than 100kPa, a sensitivity of up to 2 / kPa, and a power consumption of less than 30μW, which can detect pressure in any direction in three-dimensional space. Specific embodiment 4

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Abstract

The invention provides an aerogel pressure sensor, and belongs to the technical field of sensors. The aerogel pressure sensor is prepared based on an aerogel material, and comprises an aerogel, an electrode in contact with the aerogel, and an electrical signal measuring device that measures a change in an electrical signal between the electrode and the aerogel. The aerogel is an elastic conductiveaerogel. The elastic conductive aerogel material has certain conductivity, good elasticity and a porous network structure. The aerogel pressure sensor provided by the invention not only has a large working range and strong detection capability, but also has a low arrangement cost; and is suitable as a tactile sensor for monitoring human body health signals and for mechanical bionic hands.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an airgel pressure sensor. Background technique [0002] Pressure is a physical quantity that often needs to be measured or dynamically monitored in production and life. The existing common pressure sensors include metal strain gauge pressure sensors, ceramic pressure sensors, diffused silicon pressure sensors, piezoelectric pressure sensors, and semiconductor pressure sensors. The sensitive materials used in these pressure sensors, such as steel and silicon, have high Young's modulus and low sensitivity coefficient, which leads to the weak detection ability of these types of sensors for small pressure, that is, the lower detection limit is higher, up to several kPa. Compared with the traditional pressure sensor, the new type of pressure sensor developed in recent years that uses conductive rubber mixed with carbon or metal particles with a small Young's modulus as the sensitive...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/20G01L9/02
CPCG01L1/20G01L9/02
Inventor 肖卓建周维亚王艳春解思深
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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