NiO-based memristor device with analog and digital multifunctions and prepared by adopting solution combustion method, and preparation method thereof
A technology of solution combustion and memristive devices, which is applied in the field of microelectronics, can solve the problems that single devices are rarely reported and the resistance switching mechanism of analog memristive devices is unclear, and achieve low cost, reduced manufacturing complexity, and process compatibility Good results
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[0031] The accompanying drawings are for illustrative purposes only, and should not be construed as limitations on this patent; in order to better illustrate this embodiment, certain components in the accompanying drawings will be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art It is understandable that some well-known structures and descriptions thereof may be omitted in the drawings. The positional relationship described in the drawings is for illustrative purposes only, and should not be construed as a limitation on this patent.
[0032] figure 1 It is Si / SiO in the embodiment of the present invention 2 Schematic diagram of the structure of a / Ti / Pt / NiO / Ag memristor. Including substrate Si / SiO 2 , the bottom electrode Ti / Pt, the resistive dielectric layer NiO, and the top electrode Ag. Si / SiO in the embodiment of the present invention 2 The specific preparation process of / Ti / Pt / NiO / Ag memristor is as foll...
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