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Transparent conductive layer and method for manufacturing display panel

A technology for a transparent conductive layer and a manufacturing method, applied in coatings, metal material coating processes, vacuum evaporation plating, etc., can solve problems such as poor appearance, scratches, insufficient hardness of the transparent conductive layer, etc. Effects of Wet Capability

Active Publication Date: 2020-06-23
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the display panel with the above-mentioned transparent conductive layer is prone to poor appearance after high-temperature and high-humidity tests, such as figure 1 Mildew
In addition, the hardness of the transparent conductive layer is not enough, and it is easy to be scratched during the process

Method used

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  • Transparent conductive layer and method for manufacturing display panel
  • Transparent conductive layer and method for manufacturing display panel

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Embodiment Construction

[0032] Figure 2A to Figure 2B It is a schematic cross-sectional view of a manufacturing process of a display panel according to an embodiment of the present invention. See Figure 2A First, a transparent conductive layer 110 is formed on the first substrate 120. For example, in this embodiment, the transparent conductive layer 110 can be formed by physical vapor deposition (PVD). In detail, the first substrate 120 and the indium tin oxide sputtering target material T can be disposed in the cavity V, wherein the first substrate 120 is disposed on the first electrode (not shown), and the indium tin oxide sputtering target material T is used as the second electrode; then, the working gas (for example: including oxygen O 2 And argon gas (Ar) in the cavity V, the working gas is ionized by an electric field between the first electrode and the second electrode to form a plasma, the plasma includes a plurality of ions i; a plurality of ions i will be accelerated by the electric field...

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Abstract

A method for manufacturing a transparent conductive layer comprises the following steps: a ratio of oxygen partial pressure to argon partial pressure is A, and ions generated by plasma bombards an indium tin oxide sputter target at a condition of 0.009 <= A <= 0.0150, so as to form a transparent conductive layer on a first substrate.

Description

Technical field [0001] The present invention relates to a method for manufacturing a conductive layer and a panel, and more particularly to a method for manufacturing a transparent conductive layer and a display panel. Background technique [0002] The liquid crystal display panel can produce various liquid crystal optical performances by choosing different liquid crystal materials and electrode designs. The liquid crystal display panels used today can be roughly divided into nematic (Twisted Nematic; TN), vertical alignment (VA), and in-plane-switching (IPS). The in-plane switching liquid crystal display panel has excellent wide viewing angle and low color shift characteristics, so it has been widely used in high-end electronic products. [0003] In the in-plane switching type liquid crystal display panel, the pixel electrode and the common electrode are all arranged on the same substrate, and the parallel electric field generated by the pixel electrode and the common electrode c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/08
CPCC23C14/0036C23C14/08C23C14/34
Inventor 苏家妮林永龙罗勖诚林建亨
Owner AU OPTRONICS CORP