Power supply apparatus having passive element and power supply method for plasma ignition using the same
A technology of plasma and passive devices, applied in the direction of transformer/inductor magnetic core, irreversible DC power input to AC power output, circuit, etc., can solve the problem of difficult to ensure the phase difference of inverter voltage and current, etc. problem, to achieve the effect of reducing the size
Inactive Publication Date: 2018-09-07
NEW POWER PLASMA CO LTD +1
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Moreover, it is difficult to ensure the voltage and current phase difference of the inverter used for soft switching
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[0051] Hereinafter, the embodiments described in this specification will be described in detail with reference to the drawings, and the same or similar constituent elements will be given the same reference numerals regardless of the reference numerals, and redundant description will be omitted. The suffixes "module" and "part" used in the following description for structural elements are given or mixed in consideration of the simplicity of specification formulation, and do not have mutually distinguishing meanings or functions. In addition, in describing the embodiments described in this specification, if it is judged that the detailed description of the related known technology makes the gist of the present invention unclear, the detailed description will be omitted. Moreover, the accompanying drawings are only for simple understanding of the embodiments disclosed in this specification, and the technical ideas proposed in this specification are not limited to the accompanying ...
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The invention relates to a power supply apparatus having a passive element and a power supply method for plasma ignition using the same. The power supply apparatus having a passive element for plasmaignition in a plasma generator includes: a switching power supply including a rectifier and an inverter; a transformer including a primary winding and a ferrite core around which the primary winding is wound; and a resonance network connected between the switching power supply and the primary winding and including a resonance inductor connected to the primary winding in series and a resonance capacitor connected to the primary winding in parallel and connected to the resonance inductor in series, wherein the resonance network includes the passive element having one end connected to the resonance capacitor in series and the other end connected to a ground, and magnitudes of a voltage and a current of the inverter are adjusted by the passive element.
Description
technical field [0001] The present invention relates to a power supply device with passive devices and a power supply method for plasma ignition using the same, and in more detail, to a power supply device with passive devices for igniting and maintaining plasma in a plasma generator and its use Its method of power supply for plasma ignition. Background technique [0002] Plasma discharge can generate reactive gas including ions, free radicals, atoms and molecules by exciting the gas. Reactive gases are used in numerous and scientific fields including the handling of solid substances such as semiconductor crystals, powders and other gases. The plasma state is a state in which the gas is ionized when the gas is based on high energy. This type of plasma generator is used for etching, cleaning, etc. in the contemporary semiconductor manufacturing process, and its importance is gradually increasing with the expansion of the semiconductor market. . [0003] Generally, in a sem...
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IPC IPC(8): H01J37/24
CPCH01J37/32183H01F27/24H01J37/321H02M7/44H01J37/24
Inventor 成原镛丘根完李秉国柳承喜林昌燮文洪权
Owner NEW POWER PLASMA CO LTD