Air floatation supporting guide device with non-equal-depth throttling cavities
A technology of guiding device and throttling cavity, which is applied in the direction of air cushion bearings, linear motion bearings, bearings, etc., can solve the problems of many moving links, poor rotational stiffness, and bulky volume, and achieve enhanced rotational stiffness, wide application, and improved gas pressure. Effect of Membrane Stiffness
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[0027] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0028] refer to figure 1 , an air bearing guide device with a non-equal depth throttle cavity, including an air bearing guide rail 1, a U-shaped air bearing base plate 2, an air seal screw 3, an air bearing cover plate 4, a load unit 5 and a guide rail base 6 ;The air seal screw 3 connects the U-shaped air-floating bottom plate 2 and the air-floating cover plate 4, the load unit 5 is installed on the air-floating air-floating cover plate 4, and the guide rail 1 is installed on the U-shaped air-floating bottom plate 2 and the air-floating cover plate 4 In the formed force-closed air bearing and guiding structure; during operation, the air bearing guide rail 1 is fixed by the guide rail base 6, and the floating bottom plate 2, the air bearing cover plate 4 and the load unit 5 move along the direction of the air bearing guide rail 1.
[0029] refer to ...
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