A method for manufacturing a quartz disk resonant micromachined gyro resonator
A technology of a micromachined gyroscope and a manufacturing method, which is applied in the direction of gyroscopic effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve the problems of difficulty in the manufacturing process of a quartz disk microstructure, and achieves reduced energy consumption and simple implementation. , the effect of saving time
Active Publication Date: 2020-08-14
BEIJING INST OF AEROSPACE CONTROL DEVICES
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[0004] The purpose of the present invention is to overcome the deficiencies of the prior art, provide a method for manufacturing a quartz disk resonant micromachined gyro resonator, solve the problem that the quartz disk microstructure manufacturing process is difficult, and realize the quartz disk resonant micromachine High-precision batch manufacturing of gyro resonators
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[0026] In order to make the technical solution of the present invention clearer, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments:
[0027] Such as Figure 1~3 As shown, a method for manufacturing a quartz disc resonant micromachined gyro resonator proposed by the present invention includes the following steps:
[0028] Step 1: Etching the silicon carbide wafer 1 to make an etching groove 2 corresponding to the microstructure of the disk resonator;
[0029] The second step: bonding the etched silicon carbide wafer and the quartz wafer (quartz glass) 3 to form a wafer bonding structure;
[0030] Step 3: heating the wafer bonding structure at a temperature higher than the softening point of the quartz glass until the quartz glass is evenly poured into the etching groove 2 of the silicon carbide wafer, and then stop heating;
[0031] Step 4: thinning and polishing the silicon carbide wafer 4 poured into...
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Abstract
The invention discloses a method for manufacturing a quartz disc type resonant micro-mechanical gyro resonator. The method comprises the following steps: etching a silicon carbide wafer, and making anetching groove corresponding to the microstructure of the disc type resonator; bonding the etched silicon carbide wafer and quartz glass; heating the obtained wafer bonded structure at a temperaturehigher than the softening point of the quartz glass until the quartz glass is uniformly poured into the etching groove of the silicon carbide wafer, and then stopping the heating; thinning and polishing the quartz glass-poured silicon carbide wafer to remove the quartz glass outside the etching groove; and removing silicon carbide by a dry etching process to complete the release of the structure of the quartz disc type resonator. The method solves the problem of large difficulty of quartz disc type micro-structure manufacturing technologies, and realizes high-precision batch manufacturing of the quartz disc type resonant micro-mechanical gyro resonator.
Description
technical field [0001] The invention relates to a method for manufacturing a quartz disc resonant micromachined gyro resonator, belonging to the technical field of MEMS solid vibration gyroscope manufacturing. Background technique [0002] The disk resonant micromechanical gyroscope is an angular rate sensor based on the Coriolis effect. After the disk resonator is driven, it works in a certain driving mode. When the external angular motion is input, the generated Coriolis Lili couples energy into the harmonic oscillator mode, so that a response vibration mode whose amplitude is proportional to the angular velocity input appears. The change of the vibration amplitude is detected by the electrodes, and the real angular motion can be obtained after demodulation and calculation. [0003] The performance of the resonant oscillator is the primary factor affecting the performance of the disk resonant micromachined gyroscope. The performance of the harmonic oscillator is mainly ch...
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IPC IPC(8): G01C19/5769
CPCG01C19/5769
Inventor 李新坤庄海涵梁德春王风娇吴浩越刘福民徐宇新王学锋
Owner BEIJING INST OF AEROSPACE CONTROL DEVICES