79 results about "Microstructure fabrication" patented technology

A micro structure manufacture method includes the steps of: (a) preparing an etching object having an etching target film, provided with a lower hard mask layer and an upper hard mask layer stacked on the etching target film; (b) forming a resist pattern above the etching object; (c) etching the upper hard mask film by using the resist pattern as an etching mask to form an upper hard mask; (d) after the step (c), removing the resist pattern; (e) after the step (d), thinning the upper hard mask by etching; (f) etching the lower hard mask film by using the thinned upper hard mask as an etching mask to form a lower hard mask; and (g) etching the etching target film by using the upper hard mask and the lower hard mask as an etching mask, wherein the upper hard mask film is capable of being more easily etched, using the resist pattern as a mask, than the lower hard mask film. The micro structure manufacture method can etch a fine pattern with good yield.

A method of fabricating medical devices and medical devices made from the method of fabricating a medical device, the medical device, without being exhaustive, may be a medical instrument, an implant, a prosthetic, a body support structure or the like. The method includes work-hardening a work-hardenable metal to achieve a desired microstructure of the metal, then fabricating a medical device in accordance with the desired microstructure utilizing the work-hardened metal. In one form, the desired microstructure is an elongated grain structure. The medical device is created from the grain-elongated metal such that the medical device is oriented relative to the plane of grain elongation. In a particular form of the invention, the medical device is a curved spine plate wherein elongated grains of the work hardened metal are oriented in a plane normal to a curvature of the spine plate. Work-hardening includes forging, cold rolling or hot rolling, and annealing prior to use in medical device fabrication. This creates a metal implant stock that has more strength and flexibility in compression and bending than without undergoing the present work-hardening. These properties are exploited in medical device design, fabrication, fabrication orientation and / or the like to create medical devices such as super strong implants.

A microstructure manufacturing method includes forming a first insulating film on an Si substrate, exposing an Si surface by removing a part of the first insulating film, forming a recessed portion by etching the Si substrate from the exposed Si surface, forming a second insulating film on a sidewall and a bottom of the recessed portion, forming an Si exposed surface by removing at least a part of the second insulating film formed on the bottom of the recessed portion, and filling the recessed portion with a metal from the Si exposed surface by electrolytic plating.

New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Compensation for etching-related structural artifacts can be accomplished by proper use of such an etching delay layer.

The disclosed methods and apparatus improve the fabrication of solid fibers and microstructures. In many embodiments, the fabrication is from gaseous, solid, semi-solid, liquid, critical, and supercritical mixtures using one or more low molar mass precursor(s), in combination with one or more high molar mass precursor(s). The methods and systems generally employ the thermal diffusion / Soret effect to concentrate the low molar mass precursor at a reaction zone, where the presence of the high molar mass precursor contributes to this concentration, and may also contribute to the reaction and insulate the reaction zone, thereby achieving higher fiber growth rates and / or reduced energy / heat expenditures together with reduced homogeneous nucleation. In some embodiments, the invention also relates to the permanent or semi-permanent recording and / or reading of information on or within fabricated fibers and microstructures. In some embodiments, the invention also relates to the fabrication of certain functionally-shaped fibers and microstructures. In some embodiments, the invention may also utilize laser beam profiling to enhance fiber and microstructure fabrication.

An immobilization method, an apparatus, and a manufacturing method of a microstructure are provided, where the method including the electrospray step by which a solution containing at least one objective substance is supplied to a capillary; and immobilization step by which the objective substance in the solution atomized in the electrospray step is immobilized on an object, which is to be coated and has an arbitrary shape, in a dried state by an electrostatic force while retaining functionality and / or activity of the objective substance, resulting in a thickness on the order of nanometers.

A microstructure manufacturing method includes forming a first insulating film on an Si substrate, exposing an Si surface by removing a part of the first insulating film, forming a recessed portion by etching the Si substrate from the exposed Si surface, forming a second insulating film on a sidewall and a bottom of the recessed portion, forming an Si exposed surface by removing at least a part of the second insulating film formed on the bottom of the recessed portion, and filling the recessed portion with a metal from the Si exposed surface by electrolytic plating.

A micro structure which is preferred as an original plate of an antireflection, a mold of nano imprint or injection molding is obtained by a single particle film etching mask on which each particle is precisely aligned and closest packed in two dimensions. A single particle film etching mask is produced by a drip step wherein a dispersed liquid in which particles dispersed in a solvent are dripped onto a liquid surface of a water tank, a single particle film formation step in which a single particle film which consists of the particles by volatizing a solvent is formed, and a transfer step in which the single particle film is transferred to a substrate. The single particle film etching mask on which particles are closest packed in two dimensions, has a misalignment D(%) of an array of the particles that is defined by D(%)=|B−A|×100 / A being less than or equal to 10%. However, A is the average diameter of the particles, and B is the average pitch between the particles in the single particle film.

The present invention provides a method for removing sacrificial materials in fabrications of microstructures using a selected spontaneous vapor phase chemical etchants. During the etching process, an amount of the etchant is fed into an etch chamber for removing the sacrificial material. Additional amount of the etchant are fed into the etch chamber according to a detection of an amount or an amount of an etching product so as to maintaining a substantially constant etching rate of the sacrificial materials inside the etch chamber. Accordingly, an etching system is provided for removing the sacrificial materials based on the disclosed etching method.

The invention relates to a combined machining system utilizing ultrashort pulse lasers, and belongs to the technical field of precision machining combining ultrafast laser machining and traditional laser machining. The combined machining system is mainly composed of a lighting light source, a beam splitter prism, a CCD image detector, a femtosecond laser, an annular aperture diffraction grating, a first dichroic mirror, a picosecond laser, a second dichroic mirror, a focusing lens, a two-dimensional moving table and a microcomputer control system. The combined machining system has the advantages that the advantage of high femtosecond laser machining precision and the advantages of high energy density and efficiency of picosecond laser machining are combined, the requirements for high efficiency and high precision in the laser machining process can be met simultaneously, and the combined machining system can be widely applied to the fields of laser drilling with the high depth-diameter ratio, fine machining of key parts of the aerospace field, and micro / nano sensor and microstructure manufacturing.

The invention discloses a manufacturing method of an optical microstructure, a machine table and a light guide plate of the machine table. The manufacturing method of the optical microstructure of the multimode laser machining machine table includes the steps that a substrate is provided; a first laser beam and a second laser beam are irradiated to a beam combiner, and the first laser beam and the second laser beam have different laser modes. The multimode laser machine table used for executing and manufactured through the manufacturing method of the optical microstructure of the multimode laser machining machine table comprises a first laser resonant cavity, a second laser resonant cavity, a bearing platform and a machining unit. The light guide plate is provided with a plurality of optical microstructures. According to the multimode laser machining machine table, the method and the light guide plate of the machine table, the first laser beam coincides with the second laser beam through the beam combiner, a micro concave part and a sunken part can be formed in the substrate through one-time machining and irradiating, the time needed for machining is effectively shortened, and therefore the production efficiency is improved, and a better flattening effect can be achieved on the surface of the substrate.

The invention provides a manufacturing method of an optical microstructure, a processing machine cabinet and a light guide plate die. The method is characterized in that a laser beam irradiates a substrate having a melting temperature and one processing temperature of the laser beam meets a condition that C2 is larger than or equal to C1 and is smaller than or equal to (1.1*C1); and when the laser beam bombards the substrate, the substrate is melted down and then is cooled, and thus at least one protrusion part and a recessed part arranged at the peripheral side of the protrusion part are formed on the surface of the substrate. Therefore, the protrusion part can be formed on substrate based on laser processing by controlling the processing temperature. The substrate can be used as a manufacturing die of a light guide plate and coats the outer side of a roller to carry out pressing processing on the light guide plate, so that a recessed microstructure is formed on the surface of the light guide plat by corresponding to the protrusion part and the protrusion part is not easy to crack during the pressing application process. The structure strength is excellent; and the service life of the die can be prolonged.

There are provided a processing liquid for suppressing pattern collapse of a microstructure which includes at least one compound selected from the group consisting of an imidazolium halide containing an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide containing an alkyl group having 14 or 16 carbon atoms and an ammonium halide containing an alkyl group having 16 or 18 carbon atoms, and water; and a method for producing a microstructure formed of silicon oxide using the processing liquid.

The invention provides a microprobe scratching machining method with a force feedback control function for manufacturing a microstructure, belongs to the technical field of micro-nano structure machining, and can achieve the low-cost and high-precision machining to complex microstructures such as micro scale grooves and the like. The method comprises the following steps: firstly, a workpiece is placed on a precise working table in the X-Y direction, a microprobe cutter is ensured to automatically approach to the surface of the workpiece and maintain a constant force F according to a set force initial value (set value), the initial value of the constant force F is 5 to 20 mN, after the microprobe cutter is in contact with the surface of the workpiece directly, the microprobe cutter starts to conduct the scratching machining, a force closed loop control module is started, the microprobe cutter moves up and down on a micro-motion working table in the Z-direction to achieve the in-time closed loop control to a vertical force, the precise working table in the X-Y direction drives the workpiece to precisely move to achieve the processing to the micro groove structure, after the micro groove structure is processed, the force closed loop control is finished, the microprobe cutter is driven upwards by a coarse-motion working table in the Z-direction to be separated from the surface of the workpiece, and the processing is over. The invention is used for processing the micro groove structure of the workpiece.

A microstructure roller formed of a cylinder and a resin pattern layer is disclosed. The microstructure roller is made by: providing a cylinder having a groove extending around the periphery, and then adhering a flexible mold plate to the periphery of the cylinder to have a cavity be defined in between the groove of the cylinder and a patterned face of microstructure patterns of the flexible mold plate, and then filling a resin in the cavity, and the curing the resin, and then removing the flexible mold plate from the cylinder.

The invention relates to a special nano zirconium dioxide composite powder material for architectural outer wall insulation paint and a preparation method thereof, belonging to the field of manufacturing of metal oxide ultrastructures. The material is characterized by comprising the following chemical components in percentage by mass: 70-90% of zirconium dioxide (ZrO2) and 10-30% of titanium dioxide (TiO2). The preparation method comprises the following steps: continuously spraying an atomized ammonium bicarbonate water solution into an anhydrous ethanol solution (which is prepared by respectively preparing zirconium oxychloride (ZrOCl2.8H2O) and tetrabutyl titanate and mixing evenly) in a stirring state to react to obtain a mixed sol, carrying out azeotropic dehydration on the mixed sol by using butanol as an azeotrope former to obtain a dry material, and calcining to obtain the special nano zirconium dioxide composite powder material for architectural outer wall reflective insulation paint, of which the particle size is 30-50nm and the specific area is greater than or equal to 30 m<2> / g. The invention provides a high-activity high-dispersity high-stability special nano zirconium dioxide composite powder material for architectural outer wall reflective insulation paint. The material is suitable for an architectural outer wall insulation coating. The prepared paint conforms to performance indexes specified in CB / T25261-2010.

The invention discloses a zirconia composite nano-powder material and a preparation method thereof and belongs to the field of manufacturing for metal oxide ultra-microstructures. The zirconia composite nano-powder material is characterized by being composed of the following chemical constituents in percentage by mass: 70-90% of zirconium dioxide ZrO2 and 10-30% of titanium dioxide TiO. The preparation method comprises the following steps: continuously spraying atomized ammonium bicarbonate aqueous solution in the absolute ethyl alcohol solution of zirconium oxychloride ZrOCl2.8H2O and butyl titanate which are pre-prepared respectively and uniformly mixed, while stirring, to react to prepare a mixed sol, using butanol as an azeotropy agent for the mixed sol, and then calcining the dry material after butanol azeotropy and dehydration to prepare the zirconia composite nano-powder material; the zirconia composite nano-powder material has a particle size of 30-50 nm and a specific surface area of not less than 30 m<2> / g. A zirconia composite nano-powder material which is high in activity, and good in dispersity and stability is provided; the zirconia composite nano-powder material is suitable for heat-isolating coatings for building outer walls, transparent heat-isolating coatings for vehicle windows and building glass, and transparent heat-isolating conductive coatings, as well as also suitable for being used for preparing catalysts and catalyst carriers, and used as biological materials for dentistry and orthopaedics.

The invention relates to a high-performance large-area flexible transparent electrode, a preparation method and application thereof. The method comprises the following specific steps of: 1) printing a metal patterned structure on a printing substrate in a micro-nano 3D multi-layer printing manner by using an electric field driven jet micro-nano 3D printing technology and taking metal nano slurry as a printing material, and then curing and sintering the metal patterned structure; 2) conducting transfer printing of a PDMS female die; (3) conducting transfer printing of a UV photoresist male die; (4) preparing a composite soft mold; and 5) preparing an embedded flexible transparent conductive film. The manufacturing of a microstructure with a diameter size of 10-15 microns and a height-width ratio of 0.5-4.0 is realized, and a transparent electrode structure with high light transmittance and low square resistance can be manufactured.

A microstructure manufacturing method includes forming a first insulating film on an Si substrate, exposing an Si surface by removing a part of the first insulating film, forming a recessed portion by etching the Si substrate from the exposed Si surface, forming a second insulating film on a sidewall and a bottom of the recessed portion, forming an Si exposed surface by removing at least a part of the second insulating film formed on the bottom of the recessed portion, and filling the recessed portion with a metal from the Si exposed surface by electrolytic plating.

The invention discloses a manufacturing method of a transparent microstructure. The manufacturing method comprises the following steps: the gravure is performed for ink with a transparent polymer material as an effective component on the surface of a substrate to form an ordered microarray structure; the microarray structure is heated, so that the ink forming the microarray structure is converted to a viscous flow state, and spontaneously shrinks to form a circular crown shape; and the cooling treatment is performed to form the transparent microstructure on the surface of the substrate. The manufacturing method is simple in process, can realize high-speed printing manufacturing of high-quality transparent microstructure, overcomes the defects of thick film, irregular appearance, rough surface and possession of holes in a traditional gravure printing product, prominently improves the product quality and accelerates the production speed, and largely reduces the manufacturing cost.

A microstructural manufacturing method of a mold core comprises the following steps that an aligned insert is mounted on a mold core body; then the aligned insert and the mold core body are subjectedto mirror polishing, so that a datum plane is formed by the aligned insert, and a polished face is formed by the mold core body, wherein the datum plane and the polished face are cut flush; after thealigned insert and the mold core body are subjected to mirror polishing, the aligned insert and the mold core body are separated; then the aligned insert and a processed insert are fixed to the horizontal plane, wherein the bottom face of the aligned insert and the bottom face of the processed insert are both located on the horizontal plane; then the processed insert is planed to form a smooth face, wherein the height of the smooth face relative to the horizontal plane is substantially equal to the height of the datum plane relative to the horizontal plane; and then the processed insert is cutfrom the smooth face to form a microstructural insert. In addition, the mold core is provided.

Micro capacitive switches and methods of manufacturing micro capacitive switches at variable nominal capacitance value using micro-structures on the contact plates of the same dimension. In a preferred embodiment, a separately manufactured contact plate can be mounted to a movable magnet in order to be actuated to “on” and “off” state of the capacitive switch. Depending on the contact plate's surface condition, variable contact capacitance at “on” state can be precisely specified by geometrical properties of the micro-structures on the surface, such as the density, size and depth.

A manufacturing system for a microstructure includes a rough motion stage having predetermined positioning accuracy and a large stroke length, a fine motion stage disposed on the rough motion stage and having higher positioning accuracy than the rough motion stage and a small stroke length, and the like collectively as a stage device disposed in a vacuum container, laser length measuring machines for measuring a distance to a mirror disposed on the fine motion stage, a stage control device for driving the fine motion stage by a result of measurement by the laser length measuring machines, and the like collectively as a stage control unit, and a pressing rod 44 for holding a pressure-contacting target member disposed opposite to a pressure-contacted member held by the stage device and pressure-contacting and separating the members, a pressure-contacting drive mechanism for applying a pressure-contacting force to the pressing rod 44, and the like collectively as a pressure-contacting mechanism unit.

The invention relates to an optical fiber cladding processing method, in particular to a method and system for processing superfine single crystal optical fiber cladding. In order to solve the problems of complex process route, low efficiency, poor repeatability, poor precision and the like of the existing method for preparing the single crystal optical fiber cladding, the method comprises the following steps of: simulating to obtain the diameter and the depth of a microstructure; determining the theoretical focusing spot diameter of an optical system; shaping a laser beam into a Bessel beam;carrying out space cutting on the Bessel beam; determining a microstructure manufacturing focal depth h; segmenting an optical fiber; and adjusting the focal length, and processing the microstructureon the surface of the optical fiber; The system comprises a laser, and a zoom beam expander, a variable annular diaphragm, a spatial light modulator, a reflector and a focusing microscope objective which are sequentially arranged in an emergent light path of the laser, and further comprises a laser ranging\automatic focusing device. According to the method and system, the optical fiber is segmented, each segment corresponds to different focal lengths, the processing of each segment of the optical fiber is realized by adjusting the focal lengths on line, and the processing precision is high.

A microstructure manufacturing method combining with photohardening at least includes the following steps: 1. preparing; 2. spraying glue liquid; 3. exposing to ultraviolet light; 4. removing the bottom die. By spraying liquid state glue and solidifying with the ultraviolet radiation, a finished precise microstructure can be obtained. The microstructure can be non-penetrative micro-texture or microstructure, or micro-perforated flake, and can be used for micro-optical lens array, micro-optical diffraction element, ink-jet printer, biological wafer reagent or fuel cell commutation pore or relative nanometer technology. At the same time, the method can make the pores form special geometric shape and greatly reduce the procedure and time of repairing die or correction.

The invention discloses a rapid microstructure forming and manufacturing method and belongs to the technical field of microstructure manufacturing. The method comprises the steps: a target structure is processed on a main cutting edge of a hard alloy cutter with electrical conductivity to manufacture a processing cutter used for rapid microstructure forming and manufacturing; a workpiece is mounted above a horizontal workbench of a vertical fine turning lathe; the hard alloy cutter with the microstructure cutting edge is mounted on a clamp of the vertical fine turning lathe; the cutting edge of the cutter is adjusted to a horizontal position, and the rake face of the cutter is vertical to the cutting direction; the horizontal workbench of the vertical fine turning lathe, which is provided with the processed workpiece, is controlled to approach the hard alloy cutter with the microstructure cutting edge according to the setting parameters; the height position of the cutter is gradually reduced along the cutting depth direction, the hard alloy cutter with the microstructure cutting edge is used for cutting the processed workpiece, and the height design value of the microstructure is reached, so that the rapid forming of the target microstructure is realized. The cutter can be reused, so that the rapid forming and manufacturing of the microstructure is realized with high efficiency and low cost.