The invention provides a
microprobe scratching machining method with a force
feedback control function for manufacturing a
microstructure, belongs to the technical field of micro-nano structure
machining, and can achieve the low-cost and high-precision
machining to complex microstructures such as micro scale grooves and the like. The method comprises the following steps: firstly, a workpiece is placed on a precise working table in the X-Y direction, a
microprobe cutter is ensured to automatically approach to the surface of the workpiece and maintain a
constant force F according to a set force initial value (set value), the initial value of the
constant force F is 5 to 20 mN, after the
microprobe cutter is in contact with the surface of the workpiece directly, the microprobe cutter starts to conduct the
scratching machining, a force
closed loop control module is started, the microprobe cutter moves up and down on a micro-motion working table in the Z-direction to achieve the in-time
closed loop control to a
vertical force, the precise working table in the X-Y direction drives the workpiece to precisely move to achieve the
processing to the micro groove structure, after the micro groove structure is processed, the force
closed loop control is finished, the microprobe cutter is driven upwards by a coarse-motion working table in the Z-direction to be separated from the surface of the workpiece, and the
processing is over. The invention is used for
processing the micro groove structure of the workpiece.