A detection system and method for multispectral frequency division multiplexing
A frequency division multiplexing and detection system technology, applied in the field of multi-spectral frequency division multiplexing detection systems, can solve the problems of increasing the risk of non-stationary measurement conditions, increasing measurement time, etc., and achieve the goal of avoiding non-stationary effects and reducing harmonics Interference, quick effect
Active Publication Date: 2020-08-04
XIAN TECH UNIV
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Problems solved by technology
However, state-of-the-art light scattering measurement instruments with high sensitivity and dynamic range only allow the sequential characterization of different parameters, meaning that only measurements of a fixed set of parameters are performed at a time
This leads to a significant increase in measurement time and increases the risk of non-stationary measurement conditions
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[0035] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0036] A kind of detection system of multi-spectrum frequency division multiplexing of the present invention (referring to figure 1 ), including several parallel lasers 101, variable neutral density filters 102 and dichroic mirrors 103 arranged in sequence on their respective optical axes, filter discs 104, off-axis paraboloids 105, samples 106, photodetectors 107, conversion and filtering module 108, several lock-in amplifiers 109; the number of laser 101, variable neutral density filter 102, dichroic mirror 103 and lock-in amplifier 109 is the same;
[0037] The laser group is composed of multip...
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Abstract
The invention relates to a detection system and a detection method for multi-spectral frequency division multiplexing. The apparatus comprises a plurality of laser devices providing different wavelengths, wherein a light beam is modulated into a sinusoidal light signal by a variable neutral density filter, a plurality of light beams are mixed by a dichroic mirror and are incident on the surface ofa sample through an optical system, the scattered light on the surface of the sample is received by a photoelectric detector and is converted into an electrical signal, pre-amplification and pre-processing with a filtering module are performed, the modulated signal and another reference signal passing through the variable neutral density filter are simultaneously fed into a phase-locked loop, processing is performed, and the required information is output so as to be analyzed. According to the present invention, with the system and the method, the multiple test channels can be configured so as to improve the measurement precision and save the multiple times for multi-channel testing.
Description
technical field [0001] The invention relates to a detection system and method for multispectral frequency division multiplexing. Background technique [0002] With the development of science and technology and processing technology in recent years, more and more optical parts are used in various fields such as space celestial body detection, optical instruments, lasers, machining, etc.; especially those involving X-ray optics, X-ray lasers, Ultraviolet optics, magnetic recording, optical recording, VLSI and other fields put forward extremely precise surface requirements and ultra-smooth surface processing requirements for optical parts in the optical system; the high-precision surface enables the optical system to achieve high Technical goals such as resolution, high light-gathering ability, signal-to-noise ratio, and increased field of view. [0003] For the detection of ultra-smooth optical surface defects, the commonly used methods at home and abroad include optical meas...
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IPC IPC(8): G01N21/88
CPCG01N21/88
Inventor 王红军胡雪媛陈晨解格飒田爱玲朱学亮刘丙才
Owner XIAN TECH UNIV