A three-dimensional silicon nitride integrated multi-microcavity resonant filter device and its preparation method

Abstract

The invention discloses a silicon-nitride three-dimensional integrated multi-micro-cavity resonant filter, and the filter comprises a feedback waveguide which is coated with silicon dioxide and is located at the upper layer, an integrated sub-micro-ring structure, and a micro-ring resonant cavity located at the bottom layer, wherein the feedback waveguide at the upper layer interacts with the micro-ring resonant cavity at the bottom layer, so as to divide the light of the same light source into two beams in a device and enable the two beams to be resonant for output at an output port, therebyobtaining a compact filtering effect. A metal heating electrode is attached above the micro-ring resonant cavity, thereby achieving the switching of the amplitude modulation of a loaded electric signal to the phase modulation of an optical signal. The invention also discloses a preparation method for the silicon-nitride three-dimensional integrated multi-micro-cavity resonant filter. A three-dimensional vertical integrated design enables chips to be integrated more compactly, and reduces the insertion loss of an optical waveguide. The manufacturing technology is compatible with the semiconductor processing technology. The modulation efficiency is high, and the energy consumption is low. The filter can be produced in batch at low cost, and the filter is good in application prospect in the field of optical signal processing.

Description

technical field [0001] The invention relates to the field of tunable optical filters, in particular to a silicon nitride three-dimensional integrated multi-microcavity resonant filter device and a preparation method thereof. Background technique [0002] With the advent of the era of big data, the bandwidth and capacity of communication networks are increasing rapidly. Based on the existing traditional optical signal processing devices, not only the bandwidth and speed encounter bottlenecks, but the energy consumed also increases sharply. Therefore, it is urgent to develop ultra-high-speed low-energy new integrated optoelectronic devices. Among them, the optical modulator, as a core device in many fields such as optical information processing, spectral measurement, and optical storage, has developed a variety of devices based on effects such as electro-optic, acousto-optic, and magneto-optical effects. Regulating the amplitude or phase of the output light has certain advant...

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Problems solved by technology

But so far, there is no structural design and implementation of silicon nitride three-dimensional integrated multi-microcavity resonant filter devices for self-coupling and

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