Drift correction device and automatic correction method for scanning probe microscopic imaging system
A scanning probe microscope and imaging system technology, applied in the field of drift correction devices, can solve the problems of high cost of high-precision movement, inability to eliminate drift phenomenon, poor applicability, etc.
Active Publication Date: 2018-11-02
王磊
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Problems solved by technology
Drift cannot be eliminated by adjusting the preset state of the microscope
Since the objects detected by the scanning probe microscopic imaging system are of high-precision level, it is easy to introduce new measurement errors by using the ordinary moving scanning probe or moving the detection sample to correct the drift error, and the microscopic high-precision movement Expensive to implement and poor applicability
There is still a lack of a drift correction device and automatic correction method for a scanning probe microscopic imaging system that can eliminate drift phenomenon errors in real time
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[0037] This example takes a scanning tunneling microscope using the drift correction device and automatic correction method of the present invention as an example. The flow chart of the automatic calibration method is attached figure 1 shown. For the device connection schematic diagram, see figure 2 As shown, among them, the image template matching module and the data processing module of the drift correction device pass figure 2 The controller in the controller is implemented. The controller has built-in image processing software and data processing software, and can respectively implement the image template matching algorithm to extract coordinates, and the data processing algorithm to fit the coordinates.
[0038] The compensation generating module is realized by a DC stabilized voltage power supply. The DC stabilized power supply has four DC stabilized power supply channels CH1-CH4. The drift fitting module has four channels of X, X, Y, and Y respectively, and respec...
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The invention discloses a drift correction device and an automatic correction method for a scanning probe microscopic imaging system. The automatic correction method comprises the steps of: firstly, scanning a series of images continuously after a probe and a sample are assembled and an instrument is turned on and enters a steady state; secondly, regarding some significant features in the images as templates, and calculating positions of the current template in the x and y directions in each image respectively by utilizing an image template matching algorithm; thirdly, acquiring a drift direction and a drift speed of the current scanning probe microscopic imaging system in the x and y directions through analyzing the template positions in each image, and calculating to obtain magnitudes and polarities of a bias voltage for compensating the displacement according to piezoelectric platform parameters of a scanning special probe system; and finally, serially connecting a compensating voltage into a driving circuit of piezoelectric ceramic to realize compensation in an actual scanning imaging experiment. The drift correction device and the automatic correction method for the scanning probe microscopic imaging system provided by the invention can reduce the influence of system drift on imaging quality, improve the positioning precision and imaging spatial resolution of the probe scanning system, and have important application value. .
Description
technical field [0001] The invention relates to a drift correction device and an automatic correction method of a scanning probe microscopic imaging system. Background technique [0002] The scanning probe microscopic imaging system includes scanning probe microscope and the instrument based on this scanning probe microscope, which is mainly used to obtain the micro-region topography of the sample, and its imaging resolution can reach the atomic level. Nanospectral imaging techniques based on scanning probe microscopic imaging systems (including tip-enhanced Raman spectroscopy and nanoinfrared spectroscopy) can identify chemical information of samples with nanometer-scale resolution. These scanning probe imaging techniques have important application value in the fields of surface science, material analysis, and catalysis research due to their ultra-high spatial resolution. [0003] In the scanning probe microscopic imaging system, due to various reasons such as thermal drif...
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IPC IPC(8): G01Q40/00
CPCG01Q40/00
Inventor 王磊何浩黄声超任斌
Owner 王磊