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Process technology for efficiently removing silica and recycling hydrofluoric acid

A process technology, the technology of hydrofluoric acid, is applied in the field of high-efficiency silicon removal and recovery of hydrofluoric acid, which can solve the problems of easy corrosion of microfiltration membranes, narrow application fields, and low filtration accuracy, so as to achieve broad industrial application prospects, reduce economic costs, The effect of improving purity

Inactive Publication Date: 2018-11-06
北京宝迪华禹科技发展有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In view of the defects and disadvantages of hydrofluoric acid recovery technology and equipment in the prior art, such as low filtration precision, inability to remove silicon, easy corrosion of microfiltration membrane, and narrow application field, the purpose of the embodiment of the present invention is to provide a high-efficiency silicon removal The process technology of recovering hydrofluoric acid improves the filtration accuracy and the recycling rate of hydrofluoric acid, effectively removes silicon, broadens the application field of hydrofluoric acid, effectively reduces the amount of chemical agents added and the generation of hazardous waste sludge, and makes hydrofluoric acid waste Liquid to achieve resource utilization

Method used

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  • Process technology for efficiently removing silica and recycling hydrofluoric acid
  • Process technology for efficiently removing silica and recycling hydrofluoric acid

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Embodiment 1

[0024] A hydrofluoric acid waste liquid 150000mg / L fluoride, 22900mg / L silicon, 1920mg / L aluminum, the flow rate is 0.25m3 / h, successively passed through the pneumatic diaphragm filter press, 5um PVDF filter (with PTFE filter element), 0.1um Advanced PVDF filter (with PTFE filter element), internal circulation dialysis equipment;

[0025] The large particles are removed by the pneumatic diaphragm filter press, and the solid-liquid separation is basically realized; the particles with a particle size ≥ 0.1um in the waste liquid are removed through the filter, so that the waste liquid meets the liquid inlet requirements of the dialysis equipment;

[0026] The filtered waste liquid enters the dialysis equipment, and after 3 cycles of treatment, the recovered hydrofluoric acid is collected into the acid storage tank for reuse in the workshop;

[0027] Sampling and detection showed that the silicon content in recovered hydrofluoric acid was less than 6500mg / L, and the removal rate r...

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Abstract

The invention provides a process technology for efficiently removing silica and recycling hydrofluoric acid. Acid corrosion resistant filters with different filter precision are used to effectively remove fine particles, the liquid feeding requirement of dialysis equipment is met, the dialysis equipment is prevented from being damaged; the dialysis equipment effectively removes the silica in a waste liquid through an internal circulation treatment mode, the hydrofluoric acid is recycled while the silica is removed, the purity of the recycled hydrofluoric acid is greatly improved, no chemical agent is introduced in the process, the subsequent treatment of the waste liquid effectively reduces the addition amount of a chemical neutralizing agent and the output of the hazardous waste sludge after the hydrofluoric acid is recycled, the purposes of reducing the resource investment and recycling the hydrofluoric acid are fulfilled, the economic cost is lowered, the operation is simple, no high-temperature high-pressure environment is needed, the process technology is easy to implement and has a broad industrial application prospect.

Description

technical field [0001] The invention relates to the technical field of recovery in industrial production, in particular to a process technology for efficient silicon removal and recovery of hydrofluoric acid. Background technique [0002] Hydrofluoric acid waste liquid is the waste liquid generated in the process of industrial production, mainly including unused hydrofluoric acid and pollutants after reacting with hydrofluoric acid. As an important chemical raw material, hydrofluoric acid involves petroleum, chemical industry, steel and other categories in the industrial field, resulting in a huge output of HF waste liquid. In recent years, with the development of the electronics industry, electronic grade hydrofluoric acid has been widely used in the integrated circuit industry, TFT industry, photovoltaic industry, semiconductor industry, glass products and other industrial fields, and the discharge of hydrofluoric acid waste liquid has increased year by year. Due to Its t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/19B01D36/00B01D61/00
CPCB01D36/00B01D61/00C01B7/195
Inventor 姜斐张丽琴李升军
Owner 北京宝迪华禹科技发展有限公司