Pretreatment method for matrix surface of CVD diamond coating

A surface pretreatment, diamond coating technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve problems such as bad diamond film underlying structure, reduce film base bonding force, etc. Avoid negative effects, design scientific effects

Active Publication Date: 2018-11-16
四川纳涂科技有限公司
View PDF8 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is: provide a kind of CVD diamond coating substrate surface pretreatment method, solve the deep layer of the substrate during the co

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Pretreatment method for matrix surface of CVD diamond coating

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0025] Example 1

[0026] This embodiment provides the CVD diamond coating substrate surface pretreatment method of the present invention, specifically:

[0027] Step 1. Clean the cemented carbide wire drawing die with a diameter of 2.0mm with ultrasonic for 5 minutes, then dry it, and check that the cleanliness of the cemented carbide wire drawing die is qualified, then place it neatly in a graphite crucible, and place the crucible Put it into the vacuum carbonization furnace, pump to the ultimate vacuum and keep it for 8 minutes;

[0028] Step 2. Pour hydrogen into the reaction chamber, the flow of hydrogen is 3500sccm, heat to 1100°C, control the reaction pressure to 4000Pa, react for 3 hours, after the reaction, turn off the hydrogen, evacuate to the ultimate vacuum, and hold for 8min;

[0029] Step 3. Lower the temperature of the reaction chamber to 850°C, and introduce oxygen into the reaction chamber. The flow rate of oxygen is 25sccm, the reaction pressure is controlled to 130...

Example Embodiment

[0031] Example 2

[0032] This embodiment provides the CVD diamond coating substrate surface pretreatment method of the present invention, specifically:

[0033] Step 1. Clean the cemented carbide wire drawing die with a diameter of 2.0mm with ultrasonic for 15 minutes, then dry it, and check the cleanliness of the cemented carbide wire drawing die to pass, then place it neatly in a graphite crucible, and place the crucible Put it into the vacuum carbonization furnace, pump to the ultimate vacuum and keep it for 3 minutes;

[0034] Step 2. Pour hydrogen into the reaction chamber, the flow of hydrogen is 2500sccm, heat to 1200°C, control the reaction pressure to 5000Pa, react for 1 hour, after the reaction is over, turn off the hydrogen, evacuate to the ultimate vacuum, and hold for 3min;

[0035] Step 3. Lower the temperature of the reaction chamber to 950°C, and pass oxygen into the reaction chamber. The flow rate of oxygen is 15sccm, the reaction pressure is controlled to 1100Pa, an...

Example Embodiment

[0037] Example 3

[0038] This embodiment provides the CVD diamond coating substrate surface pretreatment method of the present invention, specifically:

[0039] Step 1. Clean the cemented carbide wire drawing die with a diameter of 2.0mm with ultrasonic for 10 minutes, then dry it, and check that the cleanliness of the cemented carbide wire drawing die is qualified, then place it neatly into a graphite crucible, and place the crucible Put it into the vacuum carbonization furnace, pump to the ultimate vacuum and keep it for 5 minutes;

[0040] Step 2. Pour hydrogen into the reaction chamber, the flow of hydrogen is 3000sccm, heat to 1150°C, control the reaction pressure to 4500Pa, react for 2 hours, after the reaction is over, turn off the hydrogen, evacuate to the ultimate vacuum, and hold for 5min;

[0041] Step 3. Lower the temperature of the reaction chamber to 920°C, and pass oxygen into the reaction chamber. The flow rate of oxygen is 20sccm, the reaction pressure is controlled ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a pretreatment method for the matrix surface of a CVD diamond coating, and solves the problems of the prior art that the bottom layer structure of a diamond film is damaged since the deep-layer cobalt atoms migrate to the matrix surface layer during the coating operation and consequently the film substrate adhesion is reduced. The pretreatment method comprises the followingsteps: performing ultrasonic cleaning of hard alloy wire-drawing dies and drying the hard alloy wire-drawing dies; putting the hard alloy wire-drawing dies in order into a graphite crucible; puttingthe crucible into a vacuum carbonization furnace, and pumping air till ultimate vacuum; introducing hydrogen, heating to a set temperature and controlling the reaction pressure for reaction; after thereaction, shutting off hydrogen and vacuumizing till ultimate vacuum; lowering the temperature of the reaction chamber, introducing oxygen into the reaction chamber and controlling the reaction pressure; after the reaction, turning off the power supply and the air supply, and vacuumizing the reaction chamber till ultimate vacuum; then closing a valve of the reaction chamber; after the dies are naturally cooled to normal temperature, taking out the dies for detection; performing ultrasonic crystal implantation on the qualified wire-drawing dies, and cleaning and drying the qualified wire-drawing dies. The method disclosed by the invention has the advantages of scientific design and simple process.

Description

technical field [0001] The invention belongs to the technical field of diamond coating, and in particular relates to a method for pretreatment of the surface of a CVD diamond coating substrate. Background technique [0002] CVD diamond coating has excellent properties such as ultra-high hardness, high elastic modulus, extremely high thermal conductivity, good self-lubrication and chemical stability. After continuous research and development, the growth mechanism of CVD diamond coating has been fully demonstrated. The growth of CVD diamond coating has very strict requirements on the surface environment, especially the cobalt content of the surface layer. Cobalt has a negative effect of catalyzing graphitization. Under the action of high temperature, cobalt catalyzes diamond to form graphite. In graphite atmosphere, diamond is difficult to grow in a large area, and the growth of diamond film is hindered. Holes will be generated on the surface or bottom layer of the coating fi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C23C16/02C23C16/27
CPCC23C16/0272C23C16/27
Inventor 黄飞
Owner 四川纳涂科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap