Graphene mixed plasma modulator based on buried silicone waveguide

Abstract

The invention discloses a graphene mixed plasma modulator based on a buried silicon waveguide. The modulator comprises a mixed plasma waveguide and a graphene sandwich structure, wherein the mixed plasma waveguide comprises two silver waveguides and a buried silicon waveguide. The modulator is composed of a structure with six layers: two silver plasma waveguides, an aluminum oxide isolation layer,a graphene sandwich structure, an aluminum oxide isolation layer, a buried silicon waveguide and a silicon dioxide substrate, from top to bottom in sequence. The graphene sandwich structure comprisesan upper single-layer graphene, an intermediate aluminum oxide isolation medium and a lower single-layer graphene. The upper and lower single-layer graphene are respectively contacted with the left and right metal electrodes, and the upper and lower single-layer graphene enables the optical modulator to open and close under the action of electric signals of the left and right metal electrodes. The optical modulation with high modulation depth, low transmission loss and high modulation bandwidth can be realized, and application in an integrated high-speed all optical network can be attained.

Description

Technical field [0001] The invention relates to a hybrid plasma waveguide technology based on a buried silicon waveguide, and belongs to the technical field of graphene photoelectric modulators. Background technique [0002] The optical modulator is the key to high-speed, short-distance optical communication. At present, optical modulators are developing toward higher speed, wider bandwidth, smaller device size, and integration. Traditional modulators can no longer keep up with the development of optical fiber communications. Research on the development of new modulators is urgent. [0003] Graphene is a two-dimensional carbon nanomaterial with a hexagonal honeycomb lattice composed of carbon atoms and sp² hybrid orbitals. Because of its excellent electrical and optical properties, it has attracted widespread interest. Graphene has extremely high electron mobility and can be used to make high-efficiency light modulators. [0004] Graphene can be combined with high refractive index...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art, provide a graphene hybrid plasmonic modulator based on buried silicon waveguide, and solve the problem that the existing optical modulator cannot achieve high modulation depth while ensuring low transmission loss

Images